Method for cleaning ALD source steel cylinder
A steel cylinder and post-cleaning technology, which is applied in the direction of liquid cleaning methods, cleaning methods and utensils, chemical instruments and methods, etc., can solve problems affecting downstream applications of thin film deposition, difficult to clean, and contamination of high-purity ALD precursors
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Embodiment 1
[0029] In the clean room, put the ALD source steel cylinder in an anhydrous and oxygen-free glove box, and use anhydrous n-hexane to carry out preliminary cleaning on the steel cylinder; fill the above-mentioned cleaned steel cylinder with n-hexane, and set the temperature to 1000W at 25 Ultrasonic cleaning at ℃ for 15 minutes; after ultrasonic cleaning, move the steel cylinder out of an anhydrous and oxygen-free environment, and add 10% NaOH-isopropanol mixed solution, 10% HNO 3 The solution and ultrapure water were ultrasonically cleaned. After cleaning, it was filled with ultrapure water and left to stand for 24 hours. The amount of metal impurities remaining in the cylinder was analyzed by ICP-OES, and the results showed that the total metal impurities were less than 1ppb.
Embodiment 2
[0031] In the clean room, put the ALD source steel cylinder in an anhydrous and oxygen-free glove box, and use anhydrous n-hexane to carry out preliminary cleaning on the steel cylinder; fill the above-mentioned cleaned steel cylinder with n-hexane, and set the temperature to 1000W at 25 Ultrasonic cleaning at ℃ for 15 minutes; after ultrasonic cleaning, the steel cylinder was removed from the anhydrous and oxygen-free environment, and 10% NaOH-ethanol mixed solution, 10% HNO 3 The solution and ultrapure water were ultrasonically cleaned. After cleaning, it was filled with ultrapure water and left to stand for 24 hours. The amount of metal impurities remaining in the cylinder was analyzed by ICP-OES, and the results showed that the total metal impurities were less than 1ppb.
Embodiment 3
[0033] In the clean room, the ALD source steel cylinder is placed in an anhydrous and oxygen-free glove box, and the steel cylinder is initially cleaned with anhydrous n-heptane; Ultrasonic cleaning at 25°C for 15 minutes; after ultrasonic cleaning, remove the steel cylinder from an anhydrous and oxygen-free environment, and add 10% NaOH-ethanol mixed solution, 10% HNO 3 The solution and ultrapure water were ultrasonically cleaned. After cleaning, it was filled with ultrapure water and left to stand for 24 hours. The amount of metal impurities remaining in the cylinder was analyzed by ICP-OES, and the results showed that the total metal impurities were less than 1ppb.
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