Precision assembly device and method for hemispherical resonator gyroscope with planar electrode structure

Abstract

The invention relates to a precision assembly device and method for a hemispherical resonator gyroscope with a planar electrode structure. The method comprises the steps of obtaining a gap between a harmonic oscillator and a base electrode through a spectrum confocal sensor, and achieving the adjustment of the gap through a multi-degree-of-freedom positioning platform according to the numerical values of the gap in four directions; and obtaining the radial position deviations of the oscillator and the electrode base in the X-axis direction and the Y-axis direction through a differential capacitance detection device, feeding the radial position deviations back to a multi-axis displacement platform control system, and then achieving the function of high-precision adjustment of the radial position deviation. According to the invention, the position deviation and pitching and rolling deviation between the harmonic oscillator and the electrode base in the X, Y and Z directions can be detected and adjusted in a high-precision manner, the problems of accurate measurement and adjustment of the gap and radial position deviation between the harmonic oscillator and the base electrode of the hemispherical resonator gyroscope with the planar electrode structure are solved, the consistency of a gyroscope header is improved, the gyroscope performance is further improved, and the development requirements of a high-precision hemispherical resonator gyroscope are met.

Description

technical field [0001] The invention belongs to the technical field of inertial measurement sensors, in particular to a precision assembly device and method for a hemispherical resonant gyroscope with a planar electrode structure. Background technique [0002] The hemispherical resonant gyroscope is a new type of inertial solid gyroscope. It has unique advantages such as high precision, small size, strong impact resistance, long life, and high reliability. It has obvious advantages in military applications. According to the structure, the hemispherical resonant gyroscope can be divided into three-piece structure and two-piece structure, and the two-piece structure can be further divided into spherical electrode structure and planar electrode structure. Compared with the spherical electrode structure, the two-piece planar electrode structure hemispherical resonant gyroscope developed by Safran of France greatly reduces the assembly difficulty and production cost. The annual o...

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Problems solved by technology

Since the gap between the resonator and the electrode of the gyroscope with a planar electrode structure is generally between tens of microns and 120 microns, and the gap consistency reaches the sub-micron level, the standard gauge block needs to meet the requirements of thinness, high precision, and not easy to deform. , it is difficult to obtain

On the other hand, the resonator and the electrode base are made of hard and brittle material fused quartz. In order to form the capacitor plate, a layer of gold film needs to be plated on the surface. The gold film is soft and the thickness is on the order of microns. It is easy to scratch the surface of the gold film during the removal process, resulting in abnormal capacitance and even the scrapping of resonator or electrode base parts

And the conventional assembly method based on the standard gauge block only considers the consistency of the gap d between the resonator and the electrode, but cannot take into account the position deviation between the center of the electrode and the center of rotation of the resonator

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