Multi-channel micro-ring sensor and preparation and use method thereof

Abstract

The invention discloses a multi-channel micro-ring sensor and a preparation and use method thereof, the multi-channel micro-ring sensor comprises a sensing substrate, a waveguide micro-ring, a coating exposed sensing area and an optical fiber array, the waveguide micro-ring is manufactured on the sensing substrate by adopting a standard tape-out process, and the waveguide micro-ring comprises an input waveguide, two output waveguides and a micro-ring; according to the present invention, the multi-parameter detection purpose which can only be achieved through the traditional micro-fluidic channel is improved to the combination of the parylene C film hydrophobic effect and the microspotting instrument, such that the specific protein is fixed on the micro-ring surface through the one-step method so as to simplify the chip preparation and modification process, and the traditional micro-fluidic channel is adopted such that the size of the chip cannot be too small. The method does not depend on a microfluidic channel, the size of the chip is reduced, the higher integration level is achieved, meanwhile, the parylene C thin film one-step method is used for fixing the specific antibody, after detection is completed, parylene C can be removed, the chip is recycled, and the cost is reduced.

Description

technical field [0001] The invention relates to the technical fields of semiconductor devices, micro-nano processing and biosensing, in particular to a multi-channel micro-ring sensor and its preparation and use methods. Background technique [0002] Biosensors are a class of devices that can detect biological signals and are widely used in biomedicine, health care, environmental monitoring, drug detection, national defense security, pesticide residues, etc. The advantages of integration have attracted the attention of researchers. Among them, the microring biosensor is an optical sensing device based on the coupling theory of light, which has the advantages of small size, high sensitivity, easy portability, easy integration, and compatibility with CMOS technology; [0003] The micro-ring sensor has the advantages of high sensitivity and high integration. The micro-ring structure is made by the tape-out process, including the electron beam exposure process. Many micro-ring s...

AI Technical Summary

Problems solved by technology

[0003] The micro-ring sensor has the advantages of high sensitivity and high integration. The micro-ring structure is made by the tape-out process, including the electron beam exposure process. Many micro-ring structures are integrated on a chip of a few millimeters. When used in blood, urine and other body fluids When sensing and detecting multiple biomarkers, the application of microring devices is limited. The reason is that the common way to achieve multi-channel detection in sensors is to integrate with microfluidic chips. The structure of microfluidic chips ranges from tens of microns to The difference in size between hundreds of microns makes it difficult to effectively integrate highly integrated microring structures and microfluidic chips;

[0004] The microring sensor realizes the input and output of optical signals relying on optical fiber coupling, that is, the light wave is coupled into the waveguide by the optical fiber, and then coupled to the output optical fiber by the output waveguide. The coupling between the waveguide and the optical fiber is an important part of the microring sensing structure. Routine laboratory tests The platform needs to add a three-dimensional mobile station to continuously adjust the position of the optical fiber, so that the coupling grating of the optical fiber and the waveguide can be precisely aligned to achieve coupling. This alignment takes a long time. In the actual sensing test, in order to keep the biological activity of the enzyme as much as possible, every The shorter the test time of one step, the better. This requires that when designing the chip, the waveguide and the optical fiber on the chip are directly aligned and coupled. In the subsequent test process, there is no need to align again, shorten the test time, and retain the biological activity of the enzyme. However, the micro-ring sensor chip processed by the above process is often expensive. Therefore, the present invention proposes a multi-channel micro-ring sensor and its preparation and use method to solve the problems existing in the prior art

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