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Large-area-array high-sensitivity flexible elastic pressure sensor and preparation method thereof

A pressure sensor, flexible and elastic technology, which is applied in the field of large area array high-sensitivity flexible and elastic pressure sensor and its preparation, can solve the problems of insufficient array area, insufficient stretchability and flexibility, etc., and achieves large array area, high sensitivity, The effect of expanding the area

Pending Publication Date: 2021-11-30
CHONGQING INST OF GREEN & INTELLIGENT TECH CHINESE ACADEMY OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The sensor of the present invention has high sensitivity and is easy to prepare, but has the disadvantages that the array area is not large enough and the stretchability and flexibility are insufficient

Method used

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  • Large-area-array high-sensitivity flexible elastic pressure sensor and preparation method thereof
  • Large-area-array high-sensitivity flexible elastic pressure sensor and preparation method thereof
  • Large-area-array high-sensitivity flexible elastic pressure sensor and preparation method thereof

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Experimental program
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Embodiment 1

[0055] see figure 1 , is a composite layer structure diagram of a large area array high-sensitivity flexible elastic pressure sensor of the present invention. Specifically, the large area array high-sensitivity flexible elastic pressure sensor of this embodiment includes a first force-sensitive composite layer and a second force-sensitive composite layer.

[0056] In this embodiment, the structure of the first force-sensitive composite layer is the same as that of the second force-sensitive composite layer, and the composite layer includes a substrate, a transition layer, a spacer layer, an electrode layer and a force-sensitive layer, and the electrode layer is silver electrode.

[0057] Force-sensitive layers include conformal graphene films, micro-nano multilevel coatings, and high-resistance coatings. The conformal graphene film is formed by spraying graphene microsheet slurry on the substrate and electrode layer for the first time, and the micro-nano multi-level coating ...

Embodiment 2

[0069] In order to more clearly illustrate the structure and preparation method of a large area array high-sensitivity flexible elastic pressure sensor of the present invention, the following combination figure 2 and image 3 Explain in detail. see image 3 , is a flow chart of the preparation process of a large area array high-sensitivity flexible elastic sensor of the present invention, specifically, it includes steps:

[0070] S11, processing two pieces of leather respectively. In this embodiment, nitrogen low-temperature plasma is used to treat two artificial leather fabrics, which can improve the film-forming uniformity of the water-based force-sensitive paste and the silver paste.

[0071] S12, preparing a transition layer and an electrode layer on two pieces of leather by screen printing technology. In this embodiment, the transition layer is a serpentine polyurethane, and the electrode layer is a serpentine silver paste electrode. The serpentine structure can make...

Embodiment 3

[0079] This embodiment is a pressure imaging system made by using the large area array flexible elastic pressure sensor obtained by the preparation method of the present invention together with other modules. In order to more clearly illustrate the working principle and composition of the system, the following combined Figure 4 , Figure 5 , Figure 6 Explain in detail.

[0080] Figure 4 It is the signal crosstalk analysis diagram of the array circuit. As shown in the figure, there is a signal crosstalk problem in adjacent unit devices. Figure 5 It is the principle diagram of the zero-potential scanning method of the array circuit. The voltage is applied to each row in turn through the row selector, and the voltage of the remaining rows is zero, so as to greatly reduce the row-column signal crosstalk and increase the speed of data reading.

[0081] Figure 6 It is the working principle diagram of the low-noise array acquisition circuit and the pressure imaging system of...

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Abstract

The invention discloses a large-area-array high-sensitivity flexible elastic pressure sensor and a preparation method thereof. The pressure sensor comprises a composite layer, and the composite layer comprises a substrate, a transition layer, a spacing layer, an electrode layer and a force sensitive layer. The force sensitive layer comprises a conformal graphene film and a micro-nano multistage coating; the conformal graphene film is formed by spraying graphene microchip slurry on the substrate and the electrode layer for the first time; and the micro-nano multistage coating is formed by spraying low-conductivity composite slurry on the conformal graphene film for the second time. The preparation method comprises the following steps of firstly printing the transition layer on the substrate, then printing the electrode layer on the transition layer, preparing the spacing layer, then spraying graphene microchip slurry on the substrate and the electrode layer to obtain a conformal graphene film, and finally spraying low-conductivity composite slurry on the film to form the micro-nano multistage coating. The method has the beneficial effects that the sensitivity of the sensor is improved, the area of the array is increased, the micro integration of the array device is facilitated, and the sensor has good flexibility and stretchability.

Description

technical field [0001] The invention relates to the technical field of flexible pressure sensing, in particular to a large-area array high-sensitivity flexible elastic pressure sensor and a preparation method thereof. Background technique [0002] Flexible pressure sensors are widely used in intelligent manufacturing, intelligent medical care, education services and other fields. The rapid development of related fields puts forward an urgent demand for the sensing technology of high-performance flexible pressure sensors. High-precision flexible mechanical sensing technologies represented by robot tactile sensing, robot safety protection, wearable human health detection, and automotive intelligent sensing are booming and have huge market prospects. They have become an important indicator of a country's comprehensive strength and international competitiveness. . However, my country relies heavily on imports of high-end flexible pressure sensing array devices, which are liste...

Claims

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Application Information

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IPC IPC(8): G01L1/20G01L9/02
CPCG01L1/20G01L9/02
Inventor 杨俊
Owner CHONGQING INST OF GREEN & INTELLIGENT TECH CHINESE ACADEMY OF SCI
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