Device for clamping silicon wafer in silicon wafer visual detection process

Abstract

The invention belongs to the technical field of silicon wafer production, and particularly relates to a device for clamping a silicon wafer in a silicon wafer visual detection process. The device comprises a rotary disc, adjusting columns, mounting seats and a clamping mechanism, wherein a driving mechanism for adjusting the positions of the adjusting columns is arranged in the rotary disc, hydraulic devices are arranged in the adjusting columns, the telescopic ends of the hydraulic devices penetrate through the adjusting columns and are connected with the mounting seats, the clamping mechanism comprises two fixing seats, a left connecting seat, a right connecting seat, a driving seat and a connecting mechanism, and the left connecting seat and the right connecting seat are connected with the mounting seats close to the left connecting seat and the right connecting seat through bearings respectively. According to the device, the silicon wafer can penetrate through the space between the two fixing seats to be inserted into grooves in the driving seat and the connecting seats, and the connecting seats are rotated to drive the silicon wafer to rotate so that the surface of the silicon wafer can be observed; and meanwhile, a first motor can drive rubber driving rollers to rotate so as to drive the silicon wafer to rotate so that the corners of the silicon wafer can be conveniently inspected visually, and all-directional inspection of the silicon wafer is realized.

Description

technical field [0001] The invention relates to the technical field of silicon wafer production, in particular to a device for clamping silicon wafers during the visual inspection process of silicon wafers. Background technique [0002] With the rapid development of the information age, the society's demand for electronic chips is increasing rapidly. At the same time, people's requirements for the quality of silicon wafers, the raw material for making chips, are also getting higher and higher. [0003] During the manufacturing process of silicon wafers, defects may occur on silicon wafers, including edge chipping, scratches, cracks, etc. These defects will bring great risks to further downstream production and utilization. Therefore, all-round inspection of silicon wafers inspection is crucial. Visual inspection is an important defect detection method. This method refers to irradiating the light beam generated by the strong light onto the surface of the silicon wafer, and a...

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Problems solved by technology

[0005] The object of the present invention is to provide a device for clamping silicon wafers in the process of visual inspection of silicon wafers, so as to solve the problem of clamping the corners of silicon wafers proposed in the above background technology, which will cause blind spots in visual inspection and cannot be realized. The problem of all-round detection of silicon wafers

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