Pipeline transmission continuous vacuum coating production line structure and production method

Abstract

The invention discloses a pipeline transmission continuous vacuum coating production line structure, and particularly relates to the technical field of vacuum coating equipment. The production line structure comprises a workpiece frame and machining assemblies. At least one of the machining assemblies is provided with machining pipes provided with internal machining spaces and used for coating a to-be-machined workpiece, and at least one isolating valve used for isolating or communicating the different spaces; and the multiple machining pipes are arranged in sequence, the isolating valves are arranged between the adjacent machining pipes, and after the adjacent machining pipes are connected through the isolating valves, the internal machining spaces of the adjacent machining pipes are communicated to form a channel allowing the workpiece frame to be conveyed. The invention further provides a pipeline transmission continuous vacuum coating production method, compared with the prior art, the production line structure has the advantages of being flexible in structure, good in consistency, high in automation degree, high in controllability and the like, and the production method has the beneficial effects of being good in expansibility, convenient to operate, high in coating efficiency, high in device utilization rate and the like.

Description

technical field [0001] The invention belongs to the technical field of vacuum coating equipment, in particular to a coating production line structure. Background technique [0002] Vacuum coating technology uses evaporation, magnetron sputtering, chemical vapor deposition and other methods to form films in a vacuum environment. Compared with traditional wet coating technology, its film and substrate materials are more widely selected, and the film thickness is more controllable. The formed film has better bonding strength with the substrate, and the film forming process does not generate waste liquid, so it gradually replaces the traditional wet coating technology and is widely used in the fields of material surface coating, optical instrument manufacturing, and integrated electronic hardware manufacturing. [0003] Existing vacuum coating equipment using vacuum coating technology often has a fixed equipment structure. Taking the Chinese patent application document with the ...

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Problems solved by technology

[0004] It should be pointed out that when the vacuum coating technology is used to coat the substrate, in order to achieve the expected coating effect, it is often necessary to coat multi-layer films in stages. The thin film is installed on the workpiece once, and the workpiece is taken out after the coating is completed. After adjusting the expected processing target again, the workpiece is put back to be processed again. Each layer of thin film needs to be processed separately. It is necessary to transfer the workpiece for reprocessing, which not only consumes a lot of resources and labor, but also the whole processing process will be very cumbersome and time-consuming, and the processing efficiency will be very low

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