Magnetic rotary deposition device and high-temperature and high-pressure sintering furnace based on same

Abstract

The invention discloses a magnetic rotary deposition device and a high-temperature and high-pressure sintering furnace based on the magnetic rotary deposition device, and belongs to the field of material science equipment. The magnetic rotary deposition device comprises an explosion-proof motor, a cooling device and a magnetic coupling transmission system which are sequentially arranged from top to bottom; the magnetic coupling transmission system comprises a speed reducer, an outer magnetic rotor, an isolation sleeve and an inner magnetic rotor; the speed reducer is arranged between the explosion-proof motor and the cooling device; the isolation sleeve is arranged on the outer side of the inner magnetic rotor and separates the inner magnetic rotor from the outer magnetic rotor; the outer magnetic rotor is magnetically connected with the speed reducer through a coupler; the inner magnetic rotor is connected with a rotating shaft through a coupler; and the other end of the rotating shaft is connected with a rotary deposition substrate. According to the device, the magnetic coupling transmission system is matched with the rotary deposition substrate, so that the problem that the uniformity of a product is difficult to guarantee for chemical vapor deposition in which gas participates due to poor flowability of high-pressure gas in a furnace chamber of an existing high-temperature and high-pressure gas pressure furnace is solved.

Description

technical field [0001] The invention belongs to the field of material science equipment, and relates to a magnetic rotary deposition device for high-temperature and high-pressure sintering equipment, in particular to a high-temperature and high-pressure sintering furnace with a magnetic rotary deposition device. Background technique [0002] The high temperature pressure sintering furnace is a kind of equipment used in the field of material science, with a maximum temperature of 2200°C and a maximum pressure of 9.8MPa. Before using this equipment for high temperature and high pressure sintering, the high temperature and pressure sintering furnace must be evacuated to a high vacuum state with a vacuum pump and a diffusion pump, and then a sufficient amount of protective gas must be introduced for high pressure sintering. [0003] However, when conventional high-temperature gas pressure sintering furnaces deal with the problem of precursor cracking and deposition, due to their...

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Problems solved by technology

[0004] In order to overcome the shortcomings of the above-mentioned prior art, the object of the present invention is to provide a magnetic rotary deposition device and a high-temperature and high-pressure sintering furnace based on it, so as to solve the technical problem that the atmosphere in the high-temperature and high-pressure sintering furnace is not uniform and it is difficult to ensure uniform deposition

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