Quartz flexible accelerometer based on miniature torquer and manufacturing method thereof

Abstract

The invention discloses a quartz flexible accelerometer based on a miniature torquer and a manufacturing method thereof. The accelerometer comprises a quartz flexible pendulous reed, and the upper and lower sides of the quartz flexible pendulous reed are respectively provided with a permanent magnet film, a capacitor plate and a silicon-based coil in sequence. Therefore, the quartz flexible accelerometer forms a push-pull structure which takes the quartz flexible pendulous reed as a symmetric center and is symmetrical at the upper side and the lower side, and the whole accelerometer is flat. The manufacturing method comprises the following steps: S1, preparing a quartz flexible pendulous reed through micro-nano processing; S2, preparing a multi-pole magnetized permanent magnet film; S3, preparing a capacitor plate through micro-nano processing; S4, preparing a silicon-based coil through micro-nano processing; and S5, integrating the quartz flexible pendulous reed, the permanent magnet film, the capacitor plate and the silicon-based coil to form the accelerometer. According to the invention, the problem of temperature drift in an existing quartz flexible accelerometer can be relieved, compatibility of device preparation and a micro-nano process is realized, and development of high-precision and miniaturized quartz flexible accelerometers in China is facilitated.

Description

technical field [0001] The invention belongs to the technical field of micro-nano sensors, and in particular relates to a quartz flexible accelerometer based on a micro torquer and a manufacturing method thereof. Background technique [0002] As the mainstream engineering application accelerometer in the world, quartz flexible accelerometer is widely used in navigation and control systems of aerospace, aviation and weapons. [0003] The traditional quartz flexible accelerometer includes three parts: upper yoke assembly-quartz pendulum assembly-lower yoke assembly. The upper and lower yoke components are composed of magnetic steel, magnetic pole caps and yokes to form a closed-loop magnetic circuit and provide an air gap magnetic field; the quartz component is composed of a quartz pendulum and a torque coil bonded on both sides. Due to the many parts of the yoke assembly, the direct contact between the key structural parts (quartz pendulum) and the heat source (torque coil),...

AI Technical Summary

Problems solved by technology

Although the above two structures have improved the stability of the device to a certain extent, they have not solved the problem of temperature drift caused by the contact between the key structural parts (quartz pendulum) and the heat source (torque coil); in addition, the preparation of the two structures is still Compatibility with micro-nano process cannot be achieved

Images