Active and passive vibration reduction device based on piezoelectric ceramics and six-degree-of-freedom vibration reduction system

Abstract

The invention discloses an active and passive vibration reduction device based on piezoelectric ceramics and a six-degree-of-freedom vibration reduction system, and belongs to the technical field of mechanical dynamics. The active and passive vibration reduction device comprises a load connector, active and passive vibration reduction mechanisms, a middle mass block, a speed sensor, a piezoelectric ceramic actuator, a displacement amplification mechanism, a foundation platform and a controller; one end of the passive vibration reduction mechanism is connected with the load connector, and the other end of the passive vibration reduction mechanism is connected with the middle mass block; the lower part of the middle mass block is connected with the displacement amplification mechanism; the speed sensor collects the movement speed of the middle mass block and feeds back a speed signal to the controller, and the controller calculates a voltage signal applied to the piezoelectric ceramic actuator according to the speed signal so as to enable the piezoelectric ceramic actuator to generate deformation displacement in the horizontal direction; and the displacement amplification mechanism converts the horizontal displacement into vertical displacement and drives the middle mass block to realize vibration reduction. According to the active and passive vibration reduction device, an active control system and a passive vibration reduction system are combined, so that the device can effectively restrain low-frequency resonance and isolate low-frequency vibration and has a good high-frequency vibration reduction effect.

Description

technical field [0001] The invention belongs to the technical field of mechanical dynamics, and more specifically relates to an active and passive vibration damping device and a six-degree-of-freedom vibration damping system based on piezoelectric ceramics. Background technique [0002] With the rapid development of microelectronics, aerospace and other fields, ultra-large-scale integrated circuits, ultra-precision CNC machine tools, etc. have higher and higher requirements for ultra-precision detection and processing, and the vibration reduction system is an important part of it. [0003] The vibration damping system is mainly divided into active damping and passive damping. Traditional dampers such as friction damping devices and spring damping devices are mostly passive damping devices. Although the damping force is large and the carrying capacity is strong, they do not have real-time Controllable, slow response. In the overall structure of the damping unit, most of them...

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Problems solved by technology

[0004] The air spring needs an additional air source, and the voice coil motor consumes a lot of energy. In addition, most of the traditional micro-displacement actuators use linear motion conversion mechanisms, and their precision is relatively low, generally only reaching the micron level. The actuator has the advantages of small size, large thrust, high displacement resolution, and fast frequency response. The principle of piezoelectric ceramic active vibration reduction control is to connect piezoelectric ceramics through electrodes. When vibration occurs, the sensor converts the vibration signal into a voltage signal. , the voltage signal generates a control signal through the controller, and the control signal acts on the piezoelectric ceramic actuator through the driver, and the inverse piezoelectric effect is used to convert the electrical energy into mechanical energy, thereby generating a high-resolution micro-displacement

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