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High-sensitivity humidity detector

A humidity detector, sensitive technology, applied in the direction of sustainable manufacturing/processing, climate sustainability, final product manufacturing, etc., can solve the problems of high cost and large volume of humidity detection devices, and achieve high humidity detection sensitivity and small size Effect

Active Publication Date: 2021-07-02
广东润宇传感器股份有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, optical fiber-based humidity detection devices are costly and bulky

Method used

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Examples

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Effect test

Embodiment 1

[0021] The invention provides a highly sensitive humidity detector, such as figure 1 As shown, it includes an antiferromagnetic layer 1 , a pinning layer 2 , a barrier layer 3 , a free layer 4 , and a hygroscopic expansion material part 5 . The material of the antiferromagnetic layer 1 is a hard magnetic antiferromagnetic material, specifically, the material of the antiferromagnetic layer 1 is IrMn, PtMn, FeMn. The pinning layer 2 is placed on the antiferromagnetic layer 1 . The material of the pinning layer 2 is a metal or semi-metal with high spin polarizability, specifically, the material of the pinning layer 2 is Co, Fe, CoFe, CoFeB, CoFeAl alloy. The barrier layer 3 is placed on the pinning layer 2 . The material of the barrier layer 3 is aluminum oxide or magnesium oxide. The free layer 4 is placed on the barrier layer 3 . The barrier layer 3 separates the pinned layer 2 and the free layer 4 . The material of the free layer 4 is soft magnetic material with weak magn...

Embodiment 2

[0025] On the basis of Example 1, such as figure 1 As shown, the hygroscopic swelling material portion 5 is in contact with the free layer 4 . In this way, when the hygroscopic expansion material part 5 expands, it will also squeeze the free layer 4, thereby changing the stress in the free layer 4, thereby changing the spin state of the free layer 4, thereby changing the magnetoresistance of the magnetic tunnel junction. Therefore, this embodiment can realize humidity detection with higher sensitivity.

Embodiment 3

[0027] On the basis of Example 2, such as figure 2 As shown, in adjacent holes, the heights of the hygroscopic expansion material parts 5 are different. In this way, the compressive forces exerted by the hygroscopic expansion material parts 5 in adjacent holes on the free layer 4 are different, thereby causing the effect of twisting stress on the free layer 4, thereby changing the spin in the free layer 4 more. state, thereby changing the magnetoresistance of the magnetic tunnel junction more, thereby achieving higher sensitivity humidity detection.

[0028] Furthermore, the holes are arranged non-periodically. That is, the distances between the holes are not equal. In this way, it is easier to cause inhomogeneous stress distribution inside the free layer 4, thereby changing the spin state of the free layer 4 more, thereby changing the magnetoresistance of the magnetic tunnel junction more, thereby achieving higher sensitivity to humidity probing.

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Abstract

The invention relates to the field of humidity detection, in particular to a high-sensitivity humidity detector. A pinning layer is arranged on an antiferromagnetic layer, a barrier layer is arranged on the pinning layer, a free layer is arranged on the barrier layer, the pinning layer and the free layer are separated by the barrier layer, a through hole is formed in the free layer, and the moisture absorption expansion material part is arranged on the barrier layer at the bottom of the hole. In the invention, the pinning layer, the barrier layer and the free layer form a magnetic tunnel junction. During application, the humidity detector is placed in an environment with humidity to be measured; meanwhile, a fixed magnetic field is applied to the humidity detector. The humidity of the environment to be measured is determined by measuring the difference between the magnetic tunnel junction magnetoresistance in the environment to be measured and the magnetic tunnel junction magnetoresistance not in the environment to be measured. The humidity sensor has the advantage of high humidity detection sensitivity.

Description

technical field [0001] The invention relates to the field of humidity detection, in particular to a high-sensitivity humidity detector. Background technique [0002] Humidity detection involves all areas of production and life. Optical fiber based humidity detection has the advantage of high sensitivity. However, optical fiber-based humidity detection devices are costly and bulky. Exploring the humidity detection technology based on new principles is of great significance for improving the sensitivity of humidity detection and reducing the volume of humidity detection devices. Contents of the invention [0003] In order to solve the above problems, the present invention provides a highly sensitive humidity detector, comprising an antiferromagnetic layer, a pinning layer, a barrier layer, a free layer, and a hygroscopic expansion material part, and the material of the antiferromagnetic layer is a hard magnetic antiferromagnetic layer. Magnetic material, the pinning layer...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/72
CPCG01N27/72Y02P70/50
Inventor 不公告发明人
Owner 广东润宇传感器股份有限公司
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