Magnetic attraction patch photoresist management method and system based on RFID tag management

Abstract

The invention provides a magnetic attraction patch photoresist management method and system based on RFID tag management. The photoresist management method is characterized by comprising the following steps: step 1, binding a magnetic RFID tag on a photoresist bottle; step 2, acquiring all Barcode label information of the photoresist bottle, and converting the Barcode label information into RFID label information; step 3, writing the RFID tag information into the RFID tag; step 4, installing a magnetic RFID reader in the photoresist cabinet, installing the photoresist bottle in which the RFID tag information is written into the photoresist cabinet, and magnetically adsorbing the RFID tag on the RFID reader; and 5, reading the photoresist information of the photoresist bottle through the RFID reader connected with the network, and visually displaying the photoresist information on the management terminal.

Description

technical field [0001] The invention relates to the technical field of tag management, in particular to a method and system for managing a photoresist of a magnetic patch based on RFID tag management. Background technique [0002] In the manufacturing process of semiconductor integrated circuit wafers, photoresists are usually stored in photoresist bottles. The management of photoresist plays an important role in the photolithography manufacturing stage. The information statistics and management of photoresist in the manufacturing process are performed correctly. Barcode and RFID methods can be used as information carriers to carry photoresist information. The traditional method uses Barcode labels. Attached to the bottle body, scan the Barcode label information on the bottle body with a scanning gun to read the corresponding photoresist bottle information. Although the Barcode tag is used as an information carrier, the information can only be read when the scanning gun is ...

AI Technical Summary

Problems solved by technology

Although the Barcode label is used as an information carrier, it can only be read when the scanning gun is manually operated.

For the photoresist bottles that have been installed on the equipment side (the installed photoresist bottles are separated from the outside of the equipment photoresist cabinet by the cabinet door, and the photoresist bottle information is in a black box state), it is difficult to read and manage in time by using traditional scanning methods Photoresist information. In addition, the traditional scanning gun method may need to move or adjust the photoresist bottle so that the Barcode label is aligned with the scanning gun. This will easily cause the photoresist in the bottle to shake and generate air bubbles, which will affect the photoresist performance.

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