A dynamic thermal radiation cooling device based on phase change material vanadium dioxide
A vanadium dioxide and refrigeration device technology, applied in the field of heat radiation, can solve problems such as weak refrigeration capacity, achieve the effects of improving adhesion, solving the problem of excessive refrigeration, and having a simple structure
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[0030] The present invention will be further elaborated below in conjunction with the embodiments and accompanying drawings.
[0031] A dynamic thermal radiation refrigeration device based on the phase change material vanadium dioxide, the preparation method of which is as follows:
[0032] Step 1, depositing (including but not limited to thermal evaporation) a layer of metal reflective layer (silver) and a layer of low refractive index medium layer (CaF 2 ).
[0033] Step 2, growing a transition dielectric layer (silicon dioxide) by sputtering or other methods to increase the adhesion of vanadium dioxide.
[0034] Step 3, preparing vanadium dioxide periodic arrays, including:
[0035] Method 1: After deposition of vanadium dioxide and annealing, photolithography is used to form a patterned disc columnar photoresist array on the surface of the vanadium dioxide film, and then the vanadium dioxide film is etched into a periodic disc structure by etching, and finally The photo...
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