Carbon dioxide sensor and preparation method thereof

Abstract

The invention discloses a carbon dioxide sensor and a preparation method thereof, which belong to the technical field of carbon dioxide sensors, and aim to provide a carbon dioxide sensor hardware structure and an improvement of the preparation method thereof. According to the technical scheme, a gallium nitride/aluminum gallium nitride epitaxial wafer with high crystal quality is generated on a silicon substrate, after one end of the epitaxial wafer is etched, an aluminum electrode is deposited through an electrode preparation technology, the other end of the epitaxial wafer is directly photoetched into a platinum electrode, then a mixture of PEI and starch is coated between the two electrodes, and therefore, the carbon dioxide sensor which is wide in detection range, reusable, good in stability and high in material utilization rate is obtained. The carbon dioxide sensor prepared by the invention has the beneficial effects of wide detection range, low price, easiness in detection, reusability and the like; the carbon dioxide sensor is installed and applied to a carbon dioxide detection circuit.

Description

technical field [0001] The invention discloses a carbon dioxide sensor and a preparation method thereof, belonging to the technical field of carbon dioxide sensors. Background technique [0002] With the continuous development of science and technology, it is necessary to increase the carbon dioxide content to improve production efficiency in the process of making carbonated drinks, welding, and producing fruits and vegetables. Once the human body inhales carbon dioxide with a concentration of more than 20%, it will form carbonic acid in the blood, causing Acidosis; therefore, the development of a gas sensor that detects carbon dioxide concentration will help improve production efficiency and protect the health of operators. [0003] The traditional carbon dioxide sensor uses infrared verification technology to detect gas, which is expensive, and the detection gas concentration range is only 0%~0.5%. Therefore, it is necessary to produce a low-cost carbon dioxide sensor with...

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Problems solved by technology

[0003] The traditional carbon dioxide sensor uses infrared verification technology to detect gas, which is expensive, and the detection gas concentration range is only 0%~0.5%. Therefore, it is necessary to produce a low-cost carbon dioxide sensor with a wide detection range; currently used nitrogen When the GaN gas sensor is used to detect the concentration of carbon dioxide, the detection range can reach 0%~50%, which can solve the shortcoming of the narrow detection range of the traditional carbon dioxide sensor; but when gallium nitride is used in the circuit for detecting carbon dioxide, it needs to first Etching at both ends, and then using magnetron sputtering to sequentially sputter the metal between gallium nitride and aluminum gallium nitrogen to form electrodes, this method is cumbersome and expensive, and the gas sensor produced has a short service life

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