Device and method for improving grating period measurement precision

Abstract

The invention discloses a device and a method for improving grating period measurement precision. The device comprises a laser device, a first isolator, a second isolator, a plurality of reflectors, a rotary table and a detector, wherein the laser device is used for emitting laser with a preset wavelength, a first through hole is formed in the first isolator, the laser penetrates through the first through hole, the first isolator is used for preventing the laser from being reflected to the laser device, a second through hole is formed in the second isolator, the laser passes through the first through hole and then penetrates through a second through hole, the plurality of reflectors are used for reflecting and changing the direction of the laser, a grating is arranged on the rotary table, the laser is reflected to the grating through the reflectors, diffracted by the grating and then returned along the same path, and the detector is used for sampling the diffracted light spots at the second through hole. The device for improving the grating period measurement precision is simple and easy to implement, and can effectively reduce the measurement uncertainty and improve the measurement precision.

Description

Technical field[0001]The present invention relates to the field of optical measurement, in particular, to a device and method for improving the measurement accuracy of the grating period.Background technique[0002]Diffraction gratings have a large number of important applications in the fields of optical spectrum analysis, optical communication systems, AR / VR display technology. In these practical applications, the requirements for the processing accuracy of the diffraction grating are high. In the relevant technique, the principle of the raster cycle is measured by the diffraction method, and the predetermined accuracy requirements can be achieved to a certain extent, but since the alignment of the diffracted light is observed, it is difficult to determine the difficulty, the accuracy is low, and the need to pass the steps The rotation of the motor controller controls the turntable; especially when the turntable is close to the self-alignment position, it is necessary to perform m...

AI Technical Summary

Problems solved by technology

In the related technology, the principle of using the diffraction method to measure the period of the grating can meet the predetermined accuracy requirements to a certain extent, but since the alignment of the diffracted light is observed and aligned with the naked eye, it is difficult to judge and the accuracy is low. The motor controller controls the rotation of the turntable; especially when the turntable is close to the self-collimation position, manual fine-tuning is required, which is time-consuming and laborious to operate and not convenient enough

Therefore, there is room for improvement in the above techniques

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