MEMS micromirror, Michelson interference system and optical system

Abstract

The invention discloses an MEMS micromirror, and the MEMS micromirror comprises a substrate and a mirror surface structure, wherein the mirror surface is located on one side of the substrate, a gap is formed between the first surface of the mirror surface and the first surface of the substrate, incident light rays emitted by a light source irradiate on the second surface of the substrate, and the incident light rays irradiate on the second surface of the substrate. The first part of incident light is reflected by the second surface of the substrate to form first reflected light, the second part of incident light is reflected by the first surface of the mirror surface structure to form second reflected light, and the first reflected light and the second reflected light are coupled to form first interference light. According to the interference system, based on the characteristics of MEMS chip surface reflection and substrate surface reflection, an interference light path is formed by coupling light reflected by a non-moving substrate and light reflected by a moving mirror surface structure in an MEMS micromirror, the interference requirement of a Michelson system is met, the arrangement of a fixed mirror is reduced, the optical path assembly efficiency of the interference system is effectively improved, and the cost of the optical structure is greatly reduced.

Description

technical field [0001] The invention relates to the field of optical design of microelectromechanical systems, in particular to a MEMS micromirror, a Michelson interference system and an optical system. Background technique [0002] MEMS (Microelectro Mechanical Systems) devices are widely used in communication, micro-optical devices, display and other fields due to their excellent characteristics, such as for making micro-projectors, micro-spectrometers, optical tomography endoscopic Mirror imaging scanning, optical switching, optical attenuator, etc. [0003] The time-modulated Fourier transform spectrometer is an optical system based on the Michelson interference system. Currently, the most typical Michelson interference structure is composed of a moving mirror, a fixed mirror, and a beam splitting prism, and the moving mirror can use the MEMS device mentioned above. When the collimated incident light is split by the beam-splitting prism, it is respectively incident on t...

AI Technical Summary

Problems solved by technology

However, due to the non-uniform motion of the moving mirror, a laser is usually added to the optical system of the spectrometer to calibrate the movement trajectory of the moving mirror. Therefore, the size of the traditional interference platform is relatively large, and there are many devices that need to be assembled and aligned. The assembly and debugging process The operation is more complicated, the adjustment accuracy is not high, and the price is relatively high

The traditional spectrometer and interferometer are difficult to operate, and the structure of the interferometer and spectrometer needs to be further improved

Images