Laser gyroscope stable inflation and high-precision leak detection system

Abstract

The invention discloses a laser gyroscope stable inflation and high-precision leak detection system. The system comprises a laser gyroscope inflation device, a helium mass spectrum leak detection device and a vacuum exhaust unit. The laser gyroscope inflation device comprises a helium gas cylinder, a neon gas cylinder, a gas mixing chamber, a pressure sensor, a mass flow meter and a gas inlet pipe connected with a laser gyroscope; the helium mass spectrometer leak detection device of the laser gyroscope comprises a helium mass spectrometer leak detector, a vacuum exhaust unit and a spray gun; the vacuum exhaust unit is composed of a mechanical pump, a molecular pump, a vacuum gauge and a vacuum exhaust pipeline. According to the invention, the laser gyroscope leak detection device and a laser gyroscope inflation packaging device are systematically combined together, so that the series of processes are connected more tightly, the cost is saved, the production efficiency is improved, an injection method helium mass spectrum leak detection technology is adopted, the leak detection precision of the laser gyroscope is greatly improved, and the minimum leak detection rate can reach the magnitude of 10 to 12pa * m <3> / s.

Description

technical field [0001] The invention relates to the technical field of laser gyro inflation and leak detection, in particular to a laser gyro stable inflation and high-precision leak detection system. Background technique [0002] Laser gyro is currently the most widely used and most accurate inertial guidance equipment. It is mainly used in aircraft, rockets, and may even work in space. Its working environment is very harsh. The gas composition and pressure in the resonant cavity of the laser gyro will change, which will finally affect the measurement accuracy of the laser gyro. Therefore, the laser gyroscope must be strictly tested for air tightness before leaving the factory. At present, the common air tightness detection method is to vacuumize the laser gyroscope. If the vacuum can reach ultra-high vacuum of 10 -7 Pa, it is considered that the airtightness is good. However, the accuracy of the instrument is difficult to identify, and it cannot ensure that the laser gy...

AI Technical Summary

Problems solved by technology

[0006] In order to solve the problem that the laser gyroscope is difficult to detect tiny leaks during the detection process, improve the detection accuracy of the laser gyroscope and the reliability of the laser gyroscope products, the invention provides a laser gyroscope stable inflation and high-precision leak detection system

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