Integrated micro gas absorption cell
A gas absorption cell and absorption cell technology, applied in instruments, measuring devices, scientific instruments, etc., can solve the problems of high cost, difficult coupling and alignment, and bulky volume, so as to reduce packaging time and cost, and reduce mutual alignment. The effect of difficult, highly sensitive gas sensing
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Embodiment 2
[0037] An integrated miniature gas absorption cell, the structure of which is as follows image 3 As shown in (A), the structure of the top plate 002 / bottom plate 004 is as follows figure 2 As shown, the integrated mirror-micro-nano lens components are as follows figure 1 shown. The difference from Embodiment 1 is that the light source and the detector adopt the large-scale equipment equipped with the large-scale gas spectrum analyzer commonly used at present, and are separated from the gas absorption cell.
[0038] Such as figure 1 As shown, a mirror 102 and a metasurface lens 103 are prepared on one side of a transparent substrate 101, and an anti-reflection film 104 is prepared on the other side, forming a mirror-micro-nano lens integrated component of a gas absorption cell. The transparent substrate 101 is made of a hard material that does not produce material absorption loss for the laser used in gas sensing; the reflector 102 can be composed of a multi-layer high ref...
Embodiment 3
[0042] The difference from the structure of the absorption pool in Example 2 is that the two mirror-micro-nano lens integrated components adopt an asymmetric combined structure, and the overall structure is shown in Figure 5 (A), Figure 5 (B) is light in Figure 5 (A) Schematic diagram of the transport process in the gas absorption cell (along Figure 5 (A) The cross-section of C-C is cut, and the working principle of the device is shown in the cross-sectional structure). For light incident and exit, the micro-nano lenses are arranged at both ends of one of the integrated components, and mirrors are prepared on the two components (except where the micro-nano lenses are located). The laser light enters the gas absorption pool through one of the micro-nano lenses, and exits from the other micro-nano lens after multiple reflections in the pool.
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