A kind of large size LED chip and its manufacturing method
A technology of LED chip and manufacturing method, which is applied in the direction of semiconductor devices, electrical components, circuits, etc., can solve the problems of loss of light output in the transparent conductive layer, and the inability to make the P-type semiconductor layer thick, etc., and achieve the effect of a stable and reliable chip structure
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[0049] In order to make the content of the present invention clearer, the content of the present invention will be further described below in conjunction with the accompanying drawings. The invention is not limited to this specific example. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0050] Such as figure 1 As shown, a large-size LED chip includes:
[0051] substrate1;
[0052] The epitaxial stack 2 located on the surface of the substrate 1, the epitaxial stack 2 at least includes a first N-type semiconductor layer 2.1, an active layer 2.2, and a P-type semiconductor layer 2.3 stacked in sequence along a first direction; the first direction is perpendicular to the substrate 1, and from the substrate 1 to the epitaxial stack 2;
[0053] a tunneling junction 3, the tunneling junction 3 is disposed on the surf...
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