Diamond gyroscope harmonic oscillator nanometer manufacturing equipment

Abstract

The invention belongs to the field of ultra-precision machining of difficult-to-machine materials, and provides diamond gyroscope harmonic oscillator nanometer manufacturing equipment. The equipment comprises a laser device, wherein the laser pulse frequency of the laser device is adjustable at 1-500 kHz, the pulse width is adjustable at 5-300 ps, the diameter of a laser spot is adjustable at 5-40microns, the power is adjustable at 0-100 W, and rough machining and finish machining can be realized at the same time; a nano mobile platform device which can realize the movement of X, Y and Z coordinate axes and the rotation around the Z axis, wherein the movement precision is less than 10nm, and the rotation precision is less than 0.02 degree; an in-situ online detection device which is usedfor carrying out in-situ detection on the machining quality by utilizing a laser interferometer; a coating device which adopts ion plating; and a focused ion beam device, wherein the acceleration voltage of the focused ion beam device can be adjusted within 2-30 kV, and the current of the focused ion beam device can be adjusted within 20pA-50 nA; the invention provides nanometer manufacturing equipment for a diamond superhard material complex structure. Nanoscale precision manufacturing of a diamond gyroscope harmonic oscillator is achieved.

Description

technical field [0001] The invention relates to a diamond gyro resonator nano-manufacturing equipment, relates to the field of nano-manufacturing of superhard materials, and belongs to the field of ultra-precision processing of difficult-to-machine materials. Background technique [0002] The inertial navigation gyroscope is a non-GPS navigation and is not affected by weather and electromagnetic interference. It is widely used in aviation, aerospace, military industry, national defense and other fields. The main part of the inertial navigation gyro is the harmonic oscillator. Its structure is very complex, and it requires high symmetry, parallelism, verticality and low surface roughness. Since the silicon etching process is relatively mature, the gyro The resonator is mainly silicon material. However, since silicon cannot be used stably under severe conditions such as high loads, its application fields are very limited. With the development of my country's national defense...

AI Technical Summary

Problems solved by technology

[0003] However, due to the high hardness, good wear resistance and stable chemical properties of diamond, it is difficult to process it by traditional processing methods.

The currently developed methods of processing diamond include mechanical grinding, chemical mechanical polishing, and thermochemical polishing. The performance of diamond high-performance devices is affected, thus affecting the service performance of the entire high-performance equipment