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Method for preparing quartz glass millimeter-scale deep micropores by utilizing femtosecond laser filament effect

A technology of quartz glass and femtosecond laser, which is applied in laser welding equipment, welding equipment, manufacturing tools, etc., can solve the problems of lower product performance, failure to achieve function and precision, and difficulties in high-precision micro-holes, and achieve large-scale processing. , high processing efficiency and high energy utilization

Active Publication Date: 2021-02-19
XI AN JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Traditional drilling methods include mechanical drilling, electric spark drilling, electron beam drilling, etc., all have certain limitations, especially on some special materials, such as glass, it is particularly difficult to process high-precision micro-holes with traditional methods; The advanced drilling process is far from meeting the requirements of deep micro-hole processing for key parts of many high-precision products, and the performance of the product is greatly reduced due to the lack of specific functions and precision required by it.

Method used

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  • Method for preparing quartz glass millimeter-scale deep micropores by utilizing femtosecond laser filament effect
  • Method for preparing quartz glass millimeter-scale deep micropores by utilizing femtosecond laser filament effect
  • Method for preparing quartz glass millimeter-scale deep micropores by utilizing femtosecond laser filament effect

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Effect test

Embodiment 1

[0023] Embodiment 1, a kind of method that utilizes femtosecond laser filament effect to prepare the quartz glass millimeter level deep microhole, comprises the following steps:

[0024] 1) Select an area of ​​5×20mm 2 , a quartz glass sample with a thickness of 5 mm, its surface is ultrasonically cleaned with acetone, absolute ethanol and deionized water, and then dried with dry air to obtain a clean quartz glass sample;

[0025] 2) Build an optical path, such as figure 2 As shown, the optical path includes a femtosecond laser 1, the output light of the femtosecond laser 1 passes through the reflector 2 to turn the optical path by 90°, and the reflected light passes through the half-wave plate 3, the beam splitting prism 4, the shutter 5, the reflector 6, and the aperture diaphragm in sequence 7. The plano-convex lens 8 and the λ / 4 wave plate 9 are vertically irradiated on the processing station of the mobile stage 10. The femtosecond laser 1, the shutter 5, and the mobile ...

Embodiment 2

[0031] In Example 2, the combination of processing parameters in Step 5) of Example 1 was changed to: laser power of 2.4W, defocus of -2mm, processing time of 23s, diameter of aperture stop 7 of 12mm, and circularly polarized light processing. Its processing effect refers to Figure 4 As shown, millimeter-scale deep micropores with an entrance aperture of 221 μm, a pore depth of 1220 μm, a depth-to-diameter ratio of 5.5:1, a taper of 5.19°, and a roundness of 88.2% were obtained, and the surface of the micropore was basically free of damage.

[0032] The beneficial effects of this embodiment are: Figure 4 , the depth of the deep micropores of the quartz glass obtained in this embodiment is slightly increased compared with Example 1 but remains almost unchanged. The taper of the hole is slightly increased; this kind of deep microhole is suitable for the manufacture of deep microholes that require large opening diameters, such as quartz glass microchannel diversion holes that ...

Embodiment 3

[0033] In Example 3, the combination of processing parameters in Step 5) of Example 1 was changed to: laser power of 2W, defocus of 0 mm, processing time of 17 s, diameter of aperture stop 7 of 12 mm, and circularly polarized light processing. Its processing effect refers to Figure 5 As shown, millimeter-scale deep micropores with an entrance aperture of 195 μm, a pore depth of 1025 μm, a depth-to-diameter ratio of 5.3:1, a taper of 5.44°, and a roundness of 88.5% were obtained, and the surface of the micropore was basically free of damage.

[0034] The beneficial effects of this embodiment are: Figure 5 , the deep micropore depth of the quartz glass obtained in this embodiment is reduced compared with Example 1, but still can reach the millimeter level, and the reduction rate of the micropore depth is greater than the reduction rate of the micropore opening diameter, so the taper of the deep microhole increases. This structure It is the smallest experimental parameter to a...

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Abstract

The invention discloses a method for preparing quartz glass millimeter-scale deep micropores by using a femtosecond laser filament effect. The method comprises the following steps that a quartz glasssample is cleaned, an optical path is built, the optical path includes a femtosecond laser, the femtosecond laser outputs a light beam with circular section to pass through a reflector, a beam splitter prism and a shutter, a circular light spot laser beam is focused through a large-focal-length plano-convex lens to obtain the condition that a femtosecond laser filament vertically irradiates on a processing station of a movable objective table, the femtosecond laser device, the shutter and the movable objective table are connected with a computer, and the computer is used for adjusting the femtosecond laser device to output different laser parameters to control the length and the action time of the femtosecond laser filaments; and the quartz glass sample is fixed to a processing station ofthe movable objective table, through femtosecond laser irradiation, the computer is used for controlling the movable objective table to move in the vertical directionto change the defocusing amount soas to change the position of the light filament in a material, and finally deep micropores are obtained. The method is simple to operate and high in processing efficiency, and a complex post-treatment process is not needed.

Description

technical field [0001] The invention belongs to the technical field of femtosecond laser micromachining, and in particular relates to a method for preparing millimeter-scale deep microholes in quartz glass by utilizing the femtosecond laser light filament effect. Background technique [0002] In recent years, in the fields of microfluidic device manufacturing and electronic packaging, there has been an increasing demand for high-precision deep micro-hole processing of transparent hard and brittle materials. In the field of precision processing, especially the size and quality of micro-deep holes requirements. Traditional drilling methods include mechanical drilling, electric spark drilling, electron beam drilling, etc., all have certain limitations, especially on some special materials, such as glass, it is particularly difficult to process high-precision micro-holes with traditional methods; The advanced drilling process is far from meeting the requirements of deep micro-h...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B23K26/382B23K26/60
CPCB23K26/382B23K26/60
Inventor 王文君廖恺梅雪松崔健磊刘斌李国基
Owner XI AN JIAOTONG UNIV
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