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Microfluidic chip and manufacturing method thereof

A technology of microfluidic chip and manufacturing method, which is applied in the direction of chemical instruments and methods, manufacturing microstructure devices, microstructure technology, etc., and can solve problems such as rough edges, chip microfluidic exit and entrance blockage, etc.

Active Publication Date: 2021-10-08
SUZHOU HAN HUA SEMICON CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The purpose of the present invention is to provide a microfluidic chip and its manufacturing method to solve the problem that the outlet and inlet of the microfluidic channel of the chip are blocked by impurities when manufacturing the microfluidic chip
In addition, by using single crystal silicon material with the same crystal orientation as the cover sheet and substrate, the problem of rough edges after laser stealth cutting of slivers is solved

Method used

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  • Microfluidic chip and manufacturing method thereof
  • Microfluidic chip and manufacturing method thereof
  • Microfluidic chip and manufacturing method thereof

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Embodiment Construction

[0043] The microfluidic chip and its manufacturing method proposed by the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. The advantages and features of the present invention will become clearer from the following description. It should be noted that all the drawings are in a very simplified form and use imprecise scales, and are only used to facilitate and clearly assist the purpose of illustrating the embodiments of the present invention. In addition, the structures shown in the drawings are often a part of the actual structure. In particular, each drawing needs to display different emphases, and sometimes uses different scales.

[0044] The invention provides a method for manufacturing a microfluidic chip, referring to figure 1 , figure 1 It is a flow chart of a method for manufacturing a microfluidic chip according to an embodiment of the present invention, and the method for manufacturing...

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Abstract

The invention provides a method for manufacturing a microfluidic chip, comprising: providing a substrate and a cover; setting a first mark on the substrate; setting a second mark on the cover; forming a microfluidic column on the substrate group and groove; align the first mark and the second mark; obtain a bonded structure, the microfluidic column group and the cover sheet constitute a micro flow channel; use a hybrid cutting process to cut the bonded structure to Get a stand-alone microfluidic chip. Further, the present invention also provides a microfluidic chip, comprising: a substrate formed with microfluidic column groups and grooves, and a cover sheet bonded on the substrate. In the present invention, the first mark and the second mark are set and aligned so that the crystal orientations of the substrate and the cover sheet can be kept consistent, and cutting by a mixed cutting process can avoid debris and impurities from clogging the chip The condition of the internal microfluidic channel improves the manufacturing yield of the microfluidic chip.

Description

technical field [0001] The invention relates to the technical field of semiconductor device manufacturing, in particular to a microfluidic chip and a manufacturing method thereof. Background technique [0002] Microfluidics (Microfluidics) chip is a micron-level mechanical structure made of semiconductor MEMS technology, which is used to precisely control the movement of micro-scale fluids, thereby controlling the preparation, reaction, detection and other operations of substances in the fluid medium. , chemical, medical and other fields have broad application prospects. Take the atomization microfluidic chip as an example, which is a chip structure with multiple microfluidic channels integrated inside. The microfluidic channels control the compression or intersecting of multiple liquids at the outlet and produce collisions to atomize the liquid into micron-sized Liquid droplets are usually widely used in inhalation drug delivery devices. The atomization microfluidic chip i...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B01L3/00B81C1/00
CPCB01L3/502707B01L2200/10B01L2300/0861B81C1/00119B81C1/00269
Inventor 范谦曹荣兵倪贤锋华斌顾星
Owner SUZHOU HAN HUA SEMICON CO LTD
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