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Magnetic type template cover jig

A template cover, magnetic suction technology, applied in the direction of optics, optomechanical equipment, instruments, etc., can solve the problem of inconvenient operation, and achieve the effect of increasing difficulty and uniform support

Pending Publication Date: 2021-01-19
SUZHOU GUANGDUO MICRO NANO DEVICE
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] The template is involved in the process of micro-nano imprinting, but the template itself has a service life and needs to be replaced every certain period of time. The template itself is also limited to a specific fixture, which needs to play a good role in the template. limit, but the template itself is very thin and fragile, so the replacement of the existing template often needs to be careful, and the operation is not very convenient

Method used

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  • Magnetic type template cover jig

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Embodiment Construction

[0026] Below in conjunction with specific embodiment, content of the present invention is described in further detail:

[0027] In order to achieve the purpose of the present invention, a magnetic suction formwork cover fixture includes: a base plate 1, the upper surface of which is equipped with a bearing surface 1b that matches the vertical projection of the formwork 2, and the outer contour of the bearing surface 1b is in the shape of a superior arc bow. There is a concave annular groove 1a around the surface 1b; the pressure ring 3 coincides with the vertical projection of the annular groove 1a, and the pressure ring 3 and the annular groove 1a are detachably assembled; the cover plate 4 includes the upper surface of the pressure ring 3. The cover ring 4c of adsorption force has a transparent plate 4a in the middle of the cover ring 4c, and an upwardly protruding handle 4b is also provided on the cover ring 4c; the pressure ring 3 and the cover ring 4c are made of ferromagn...

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PUM

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Abstract

The invention discloses a magnetic type template cover jig which comprises a bottom plate, wherein the upper surface of the bottom plate is provided with a bearing surface matched with the vertical projection of a template, the outer contour of the bearing surface is in a major arc arch shape, and a circle of concave annular groove is formed in the periphery of the bearing surface; a pressing ringwhich is matched with the vertical projection of the annular groove, wherein the pressing ring and the annular groove are detachably assembled; a cover plate which comprises a cover ring having adsorption force with the upper surface of the pressing ring, wherein a transparent plate is arranged in the middle of the cover ring, and the cover ring is further provided with an upwards-protruding handle. The pressing ring and the cover plate are made of ferromagnetic materials. According to the magnetic type template cover jig disclosed in the invention, the magnetic attraction force is utilized to adsorb and lift out the pressing ring, so that the space for replacing the template is reserved, and the template is efficiently and safely replaced.

Description

technical field [0001] The invention relates to the field of micro-nano imprinting equipment, in particular to a magnetic suction template cover jig. Background technique [0002] The template is involved in the process of micro-nano imprinting, but the template itself has a service life and needs to be replaced every certain period of time. The template itself is also limited to a specific fixture, which needs to play a good role in the template. However, the template itself is a very thin and fragile item, so the replacement of the existing template often needs to be done carefully, and the operation is not very convenient. Contents of the invention [0003] The problem to be solved by the present invention is to provide a magnetic formwork cover jig, which absorbs and lifts out the pressure ring by magnetic force, thereby freeing up space for formwork replacement, and the replacement of formwork is efficient and safe. [0004] In order to solve the above-mentioned prob...

Claims

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Application Information

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IPC IPC(8): G03F7/00
CPCG03F7/0002
Inventor 史晓华刘晓成
Owner SUZHOU GUANGDUO MICRO NANO DEVICE
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