A constant temperature air circulation system

Abstract

The present invention provides a constant temperature air circulation system. Air valves are installed behind the main circulation loop and the two three-way nodes of the parallel bypass to adjust the gas flow of each branch. When the compressor keeps the current state unchanged, the fan and wind The valve does not change. When the compressor needs to be turned from on to off, adjust the air volume of the fan and adjust the flow of the bypass and main road synchronously until the air valves controlling the flow of the evaporator are all closed and the bypass air valves are fully opened; when the compressor needs to be turned from off to on , adjust the air volume of the fan, and adjust the flow of the bypass and main road synchronously until the air valves controlling the flow of the evaporator are all opened and the bypass air valves are all closed. The adjustment of the air valve and the switching of the compressor state always ensure that the flow through the heater to the cavity remains unchanged. The invention saves energy on the system by auxiliary switching of the working state of the refrigeration heat exchange device through the bypass, and ensures that the switching of the working state of the refrigeration heat exchange device does not affect the flow rate and temperature of the gas flowing through the constant temperature chamber.

Description

technical field [0001] The invention belongs to the field of constant temperature air circulation system, and more specifically relates to a constant temperature air circulation system. Background technique [0002] The micro-environment purification device is mostly used to provide a constant temperature, constant humidity and clean environment for semiconductor manufacturing equipment and precision measurement equipment. Most of the micro-environment devices and purification rooms in the prior art use air-conditioning units composed of compressors, evaporators, condensers, and expansion valves for temperature control or improved technologies include temperature control systems based on air-conditioning units connected in series with heaters. . However, the existing technology does not take into account that turning off the compressor under certain working conditions can also ensure temperature stability and save energy while ensuring temperature stability, and the impact ...

AI Technical Summary

Problems solved by technology

[0005] Aiming at the defects of the prior art, the purpose of the present invention is to provide a constant temperature air circulation system, aiming to solve the problems that the existing air constant temperature device cannot be cooled, the adjustment range is small, or it can be cooled and heated but cannot save energy

Images