Filter circuit of ion source driving power supply and filter parameter detection method and device thereof

Abstract

The invention relates to a filter circuit of an ion source driving power supply and a filter parameter detection method and device thereof, and the filter circuit of the ion source driving power supply is an LC filter circuit, is connected in series between the ion source driving power supply and an ion source load, and comprises inductors connected in series and filter capacitors connected in parallel; the filter circuit is used for suppressing high-frequency oscillation of the real-time current waveform output by the ion source driving power supply and filtering out a high-frequency oscillation interference signal in the real-time current waveform. According to the technical scheme provided by the invention, the LC filter circuit of the high-frequency filter element, the series inductorand the parallel filter capacitor are adopted, so when the ion source driving power supply outputs power, the filter circuit can ensure that the ion source driving power supply outputs smooth direct-current voltage, high-frequency interference caused by instability in ion source load is filtered out, and the power supply is prevented from being damaged.

Description

technical field [0001] The present application relates to the technical field of ion sources. Specifically, the present application relates to a filter circuit of an ion source drive power supply, a method and a device for detecting filter parameters of the filter circuit of an ion source drive power supply. Background technique [0002] Ion source is an applied science and technology with wide application, many types, many sciences involved, strong technological process and very rapid development. Taking the Hall ion source as an example, as a very common, simple and durable ion source type, it is mostly used in the field of thin film deposition and coating of optical components. [0003] The ion source is mainly powered by the ion source drive power supply, which applies voltage to the ion source load to ionize the gas to generate ionized ions. However, due to the influence of vacuum degree, gas volume, gas type, ionization degree and neutralizer power supply, etc., the r...

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Problems solved by technology

However, due to the influence of vacuum degree, gas volume, gas type, ionization degree and neutralizer power supply, etc., the resistance of the ion source will change at high frequency, and the output current of the driving power will also change at high frequency. The change produces high-frequency interference with large energy. At the same time, the driving power supply adjusts the amplitude duty cycle of the current pulse waveform at high frequency to maintain the output voltage stability, and the output current waveform will appear high-frequency irregular oscillation. When the frequency of high-frequency oscillation exceeds When the driving power is limited, the output voltage will be extremely unstable, and even the driving power will be damaged in severe cases.

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