Full-angle mode circuit gain error self-compensation system of micro-electro-mechanical gyroscope

Abstract

The invention discloses a full-angle mode circuit gain error self-compensation system of a micro-electro-mechanical system gyroscope. The full-angle mode circuit gain error self-compensation system comprises a gyroscope pre-amplification circuit, an ADC module, a gain compensation module, a demodulation module, a parameter calculation module, a PI controller module, a coordinate conversion module,a compensation coefficient calculation module, a modulation module and a DAC module. The pre-amplification circuit module is connected to a detection electrode of the micro-electro-mechanical multi-ring gyroscope, the ADC module is connected to the pre-amplification circuit, the gain compensation module is connected to the ADC module, the demodulation module is connected to the gain compensationmodule, the PI controller module is connected to the parameter calculation module, the compensation coefficient calculation module is connected to the PI controller module, the coordinate conversion module is connected to the PI controller module, the modulation module is connected to the coordinate conversion module, the DAC module is connected to the modulation module, and the digital control oscillator module is connected to a PI controller. According to the system, real-time circuit gain error self-compensation in a full-angle mode of the micro-electro-mechanical gyroscope can be realized.

Description

technical field [0001] The invention belongs to the field of microelectromechanical systems, in particular to a full-angle mode circuit gain error self-compensation system for microelectromechanical gyroscopes. Background technique [0002] As a new type of gyroscope, micro-electromechanical (MEMS) gyroscope uses single crystal silicon as the main processing material. Compared with the traditional mechanical structure gyroscope, it has the advantages of small energy dissipation, high mechanical sensitivity, Concentrated mass, low mechanical noise and so on. Because of the above advantages, micro-electromechanical (MEMS) gyroscopes occupy an important position in the field of gyroscopes. [0003] In practical applications, micro-electromechanical (MEMS) gyroscopes can work in full-angle mode. Although the structure of the full-angle measurement and control circuit system is complex, it can directly output the rotation angle of the gyroscope. However, in most applications, t...

AI Technical Summary

Problems solved by technology

However, in most applications, the Q values ​​(quality factors) of the two modes of MEMS gyroscopes are different, so the actual gains of the x and y axes are also different. Gain error of the circuit

The angle calculation in the full-angle mode will introduce this error, resulting in a larger residual error of the angle output, which reduces the accuracy and accuracy of angle detection

Images