Automatic loading and unloading device for graphite boat sticking point

Abstract

The invention discloses an automatic loading and unloading device for a graphite boat sticking point. The automatic loading and unloading device comprises a rack main body, a moving bracket, a grabbing module, a pressing rod module and an ejector rod module. The moving bracket is fixedly mounted at the upper end of the rack main body, and a point loading station and a point unloading station are arranged at the position, corresponding to the moving bracket, of the rack main body. The ejector rod module is arranged in the rack main body and is arranged corresponding to the point loading station. A movable frame in sliding connection is arranged at the positions, corresponding to the point loading station and the point unloading station, of the moving bracket. The grabbing module is fixedlyconnected to the upper end of the moving frame, and the pressing rod module is fixedly connected to the lower end of the moving frame. The rack main body further comprises a graphite flake to-be-assembled and disassembled sticking point position, an assembled-sticking-point graphite flake position, a sticking point mold plate position and an empty sticking point mold plate position; and lifting adjusting devices are arranged at the positions, corresponding to the graphite flake to-be-assembled and disassembled sticking point position, the assembled-sticking-point graphite flake position, the sticking point mold plate position and the empty sticking point mold plate position, of the bottom of the rack main body. The device has the advantages that the sticking point replacement efficiency and percent of pass are improved, and the service life of a graphite boat is prolonged.

Description

technical field [0001] The invention belongs to the field of solar cell manufacturing, and in particular relates to an automatic loading and unloading device for graphite boat stuck points. Background technique [0002] In the production process of solar cells, the PECVD (Plasma Enhanced Chemical Vapor Deposition) coating process is an important link in the production process and plays a pivotal role. PECVD uses microwave or radio frequency to ionize the gas containing the constituent atoms of the film to form plasma locally, and the plasma is highly chemically active and easy to react, depositing the desired film on the substrate. When the silicon wafer is undergoing its surface coating process, it is necessary to insert the uncoated silicon wafer into the carrier of the PECVD coating equipment. At present, the wafer carrier usually uses a graphite boat. The specific operation process is: insert the silicon wafer into the graphite boat and position it on it through the gra...

AI Technical Summary

Problems solved by technology

[0003] The replacement method of the traditional graphite boat sticking point is manual operation, the steps are complicated and cumbersome, and the operator’s skill requirements are relatively high. If the skilled operation is not in place, the graphite boat sheet and the graphite boat stuck point will be damaged or the assembly will not be in place during the replacement process. The traditional operation method for replacing graphite boat stuck points is: graphite boat stuck points need to use a simple manual press, the operator sits in front of the press and places the graphite boat sheet flat on the manual press platform, and then sequentially removes the graphite boat sheets. More than 20 stuck points are removed with a manual press. After the graphite boat stuck points are removed, the operator will replace the new stuck points and place them on the corresponding stuck holes. Carefully use the left hand to hold the right hand and turn the press down. The strength should be well grasped. If the strength is too high, the graphite boat and the card will be crushed. If the force is too small, the pressure will not be in place. After pressing the stuck point of a graphite sheet, continue to the next graphite boat card. In general, there are many cases where the graphite boat is damaged or the stuck point is not pressed properly due to the rush of progress, resulting in damage or falling off of the silicon wafer during the production process. The efficiency is low, which leads to slow production progress and affects product quality.

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