Inert gas purification equipment and recovery and purification system

Abstract

The invention provides inert gas purification equipment which comprises a first purification assembly, a second purification assembly and a third purification assembly, the first purification assembly, the second purification assembly and the third purification assembly are sequentially connected through pipelines, and electromagnetic valves are arranged on the pipelines. The first purification assembly is used for carrying out deoxidation and denitrification treatment on passing gas, the second purification assembly is used for carrying out dehydration, hydrocarbon removal, carbon monoxide removal and carbon dioxide removal treatment on the passing gas, and the third purification assembly is used for carrying out denitrification treatment on the passing gas. The invention further providesan inert gas recycling and purifying system. Three-stage impurity removal and purification treatment are carried out on passing gas, it is guaranteed that purified argon and helium meet the use requirement, the structure is simple, the occupied area of the equipment is small, operation and maintenance are easy and convenient, the purification process is shortened, and the purification efficiencyis improved.

Description

Technical field: [0001] The technical field of the present invention is the technical field of gas purification, and in particular relates to an inert gas purification equipment and recovery and purification system. Background technique: [0002] In the existing industrial production of the single crystal industry, the single crystal furnace needs to use a large amount of high-purity inert gas, such as argon, helium, etc. every day, and the high-purity inert gas itself is expensive. If the high-purity inert gas after use If it is not recycled and reused, the production enterprise not only needs to pay a huge cost, but also causes a waste of inert gas. The recovered inert gas needs to be purified again, and it cannot be reused without further purification. [0003] For example, in the traditional gas purification technology, the argon tail gas discharged from the silicon core furnace is used as the raw material gas, which needs to be purified by hydrodeoxygenation and cryoge...

AI Technical Summary

Problems solved by technology

[0002] In the existing industrial production of the single crystal industry, the single crystal furnace needs to use a large amount of high-purity inert gas, such as argon, helium, etc. every day, and the high-purity inert gas itself is expensive. If the high-purity inert gas after use If it cannot be recycled and reused, the production enterprise not only needs to pay a huge cost, but also causes a waste of inert gas

The recovered inert gas needs to be re-purified, and it cannot be reused without re-purification.

[0003] For example, in the traditional gas purification technology, the argon tail gas discharged from the silicon core furnace is used as the raw material gas, which requires hydrodeoxygenation and purification through a cryogenic liquefaction process. It is difficult to avoid hydrogenation devices during the purification process, such as explosion-proof For the use of workshops and explosion-proof electrical equipment, the purification equipment covers a large area, and there are high safety risks in the purification process, and it is easy to cause the collapse of the tower due to the unbalanced flow rate of the recovered gas.

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