Terahertz multi-frequency detector based on integrated circuit process and detection method of terahertz multi-frequency detector

An integrated circuit and terahertz technology, applied in the field of terahertz wave detection, can solve problems such as low detection efficiency, crosstalk, and large cross-section of antenna unit array antennas

Active Publication Date: 2020-10-27
NANJING UNIV
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Problems solved by technology

Although this method broadens the terahertz detection band, the antenna unit array has a large antenna cross-section, and there is serious crosstalk between different dete...

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  • Terahertz multi-frequency detector based on integrated circuit process and detection method of terahertz multi-frequency detector
  • Terahertz multi-frequency detector based on integrated circuit process and detection method of terahertz multi-frequency detector
  • Terahertz multi-frequency detector based on integrated circuit process and detection method of terahertz multi-frequency detector

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[0025] In order to make the object, technical solution and advantages of the present invention clearer, the implementation manner of the present invention will be further described in detail below in conjunction with the accompanying drawings. Apparently, the described embodiments are only some of the embodiments of the present invention, not all of them. The described embodiments are for illustration only and do not limit the scope of the invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0026] In this embodiment, a 0.2 THz-1.1 THz multi-frequency terahertz detection chip is designed by taking the SMIC standard 0.18 μm integrated circuit technology as an example.

[0027] Table 1 Structural parameters of surface plasmon resonance multi-frequency antenna

[0028] Structural parameters Value (...

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Abstract

The invention provides a terahertz multi-frequency detector based on an integrated circuit process and a detection method of the terahertz multi-frequency detector. The detector comprises a multi-frequency surface plasma resonance antenna and a transistor, wherein the multi-frequency surface plasmon resonance antenna is composed of two symmetrically arranged antenna units, each antenna unit comprises a fan-shaped ring nested receiving surface and a horizontal oscillator, each fan-shaped ring nested receiving surface comprises an inner semicircle and an outer fan-shaped ring which are concentrically arranged, and each horizontal oscillator is vertically connected with the corresponding inner semicircle at the circle center; the transistor is arranged between the horizontal oscillators of the two antenna units and is perpendicular to the plane where the antenna units are located; and the grid electrode of the transistor and the multi-frequency surface plasma resonance antenna are locatedon the same polycrystalline silicon layer. The detector can adopt a standard integrated circuit process technology, realizes a one-core multi-frequency function on a single detector, has the outstanding advantages of small size, light weight, high precision, high reliability, low power consumption, low cost and the like, and is favorable for realizing miniaturization and miniaturization of terahertz multi-frequency detection.

Description

technical field [0001] The invention relates to the technical field of terahertz wave detection, and further relates to a detector structure and a detection method using a multi-frequency antenna as a signal receiving component. Background technique [0002] Terahertz waves usually refer to electromagnetic waves with a frequency between 0.1THz and 3THz, and its wave band is between microwave and infrared light. At present, terahertz technology mainly focuses on terahertz sources, terahertz detection and application fields. Terahertz spectroscopy contains rich physical and chemical information, and can provide basic structural information of molecules. By using multi-frequency detectors, terahertz spectral analysis of substances can be realized; at the same time, because terahertz energy is very small, it will not cause damage to substances. , so it has more advantages than X-rays. Therefore, terahertz detection technology has broad application prospects in the fields of se...

Claims

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Application Information

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IPC IPC(8): H01Q1/22H01Q1/36H01Q1/50H01Q5/28H01L31/09
CPCH01Q1/2283H01Q1/36H01Q5/00H01L31/09H01Q1/50
Inventor 纪小丽王珂闫锋任芳芳
Owner NANJING UNIV
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