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Terahertz multi-frequency detector and detection method based on integrated circuit technology

An integrated circuit and terahertz technology, applied in the field of terahertz wave detection, can solve the problems of large antenna unit array antenna cross-section, unsuitable for detector miniaturization requirements, low detection efficiency, etc., to achieve small size, light weight, low The effect of power consumption

Active Publication Date: 2022-03-18
NANJING UNIV
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Problems solved by technology

Although this method broadens the terahertz detection band, the antenna unit array has a large antenna cross-section, and there is serious crosstalk between different detection units, which makes the detection efficiency low and the structure is complex, which is not suitable for detectors in future terahertz systems. miniaturization requirements

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  • Terahertz multi-frequency detector and detection method based on integrated circuit technology
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  • Terahertz multi-frequency detector and detection method based on integrated circuit technology

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[0025] In order to make the object, technical solution and advantages of the present invention clearer, the implementation manner of the present invention will be further described in detail below in conjunction with the accompanying drawings. Apparently, the described embodiments are only some of the embodiments of the present invention, not all of them. The described embodiments are for illustration only and do not limit the scope of the invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0026] In this embodiment, a 0.2 THz-1.1 THz multi-frequency terahertz detection chip is designed by taking the SMIC standard 0.18 μm integrated circuit technology as an example.

[0027] Table 1 Structural parameters of surface plasmon resonance multi-frequency antenna

[0028] Structural parameters Value (...

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Abstract

The invention provides a terahertz multi-frequency detector based on integrated circuit technology and a detection method thereof. Its detector includes a multi-frequency surface plasmon resonance antenna and a transistor; the multi-frequency surface plasmon resonance antenna is composed of two symmetrically arranged antenna units. The antenna unit includes a sector-shaped ring nested receiving surface and a horizontal oscillator, and the sector-shaped ring nested receiving surface It includes an inner semicircle and an outer fan-shaped ring arranged concentrically, and the horizontal oscillator and the inner semicircle are vertically connected at the center of the circle; the transistor is arranged between the horizontal oscillators of the two antenna units and is perpendicular to the plane where the antenna unit is located; the gate of the transistor is connected to the multi-frequency The surface plasmon resonance antenna is located on the same polysilicon layer. The detector can use standard integrated circuit technology to realize the function of one core and multiple frequencies on a single detector. It has outstanding advantages such as small size, light weight, high precision, high reliability, low power consumption and low cost, which is conducive to realizing Miniaturization and miniaturization of terahertz multi-frequency detection.

Description

technical field [0001] The invention relates to the technical field of terahertz wave detection, and further relates to a detector structure and a detection method using a multi-frequency antenna as a signal receiving component. Background technique [0002] Terahertz waves usually refer to electromagnetic waves with a frequency between 0.1THz and 3THz, and its wave band is between microwave and infrared light. At present, terahertz technology mainly focuses on terahertz sources, terahertz detection and application fields. Terahertz spectroscopy contains rich physical and chemical information, and can provide basic structural information of molecules. By using multi-frequency detectors, terahertz spectral analysis of substances can be realized; at the same time, because terahertz energy is very small, it will not cause damage to substances. , so it has more advantages than X-rays. Therefore, terahertz detection technology has broad application prospects in the fields of se...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01Q1/22H01Q1/36H01Q1/50H01Q5/28H01L31/09
CPCH01Q1/2283H01Q1/36H01Q5/00H01L31/09H01Q1/50
Inventor 纪小丽王珂闫锋任芳芳
Owner NANJING UNIV
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