Metal-based integrated resonant accelerometer mounted on same plane

Abstract

A metal-based integrated resonant accelerometer mounted on the same plane comprises a metal base and two double-end clamped quartz tuning forks, the metal base comprises a mass block, a first flexiblehinge, a second flexible hinge and a fixed metal base, and the mass block is connected with the fixed metal base through the first flexible hinge and the second flexible hinge; the two double-end clamped quartz tuning forks have the same structure, are attached to the mass block and the fixed metal base, and are arranged in the same plane in a differential mode; the metal base is formed by processing low-stress or stress-free processes such as laser cutting, low-speed wire cutting and the like, and is provided with positioning grooves for positioning the double-end clamped quartz tuning forks, and the central axes of the positioning grooves in the DA direction perpendicular to the sensitive direction SA coincide with each other; the metal-based integrated resonant accelerometer has the advantages that the differential effect is good, the micro-assembly process is easy to implement, sensitivity is high, machining is easy, the machining precision of the precise elastic part is high, andmachining residual stress is small.

Description

technical field [0001] The invention belongs to the technical field of micro-mechanical electronics (MEMS) digital accelerometers, and in particular relates to a metal-based integrated resonant accelerometer mounted on the same plane. Background technique [0002] The resonant accelerometer converts the acceleration signal into a frequency signal, realizes the digital output of the accelerometer, has the advantages of high precision, good reliability, and strong anti-interference ability, and has a wide range of applications in aerospace, military defense, equipment manufacturing and other fields. This type of accelerometer is composed of a spring-mass system and a sensitive element. Most of the spring-mass system uses a metal base, and the sensitive element generally uses a double-ended fixed support quartz tuning fork; the working principle is that the sensitive element is in a resonant state under the influence of the corresponding excitation circuit. , the acceleration c...

AI Technical Summary

Problems solved by technology

However, due to the difference in differential arrangement, most of the designs of this type of sensor have the problems of poor differential effect and low accuracy of accelerometer, and the integration of the spring-mass system and the double-end fixed support quartz tuning fork is very important for the accuracy of the quartz tuning fork. It is extremely difficult to implement micro-assembly processes such as pressure-bonded gold wires

[0004] The metal base generally includes precision elastic parts such as flexible beams and cantilever beams with elastic properties. The processing accuracy of this structure cannot be guaranteed by traditional machining processes, and there is a large processing residual stress, which greatly reduces the accelerometer. basic accuracy

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