Narrow-linewidth continuous wave frequency modulation laser based on silicon-based external cavity self-injection
A laser and narrow linewidth technology, applied in the field of frequency modulation lasers, to achieve the effect of improving tuning rate and tuning bandwidth, low transmission loss, and compressing spectral linewidth
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[0043] Specific embodiments of the present invention will now be described in conjunction with the corresponding drawings. However, this invention may be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. These embodiments are provided only so that the present invention will be thorough and complete so that those skilled in the art can fully describe the scope of the present invention. Wording used in the detailed description of the embodiments illustrated in the drawings should not limit the invention.
[0044] Fig. 1(a) is a structural diagram of the narrow linewidth laser of the present invention. Wherein the substrate layer 101 is a silicon substrate, the top of the substrate layer 101 is the optical waveguide layer 104, the optical waveguide layer 104 is a silicon nitride waveguide, and there is SiO around the SiN waveguide. 2 The oxide layer wraps the core-clad structure that constitutes the waveguide, SiO 2 No...
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