Vertical Marangoni Wafer Handler
A technology for processing devices and wafers, which is applied in the manufacturing of electrical components, circuits, semiconductor/solid-state devices, etc. It can solve the problems of high-speed backsplash, large equipment volume, large space occupation and difficult composite integration, etc., and reduce the operating speed of equipment. , Improve equipment stability and save valuable space
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[0028] The application will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain related invention points, rather than to limit the invention. It should also be noted that, for ease of description, only parts related to the invention are shown in the drawings.
[0029] It should be noted that, in the case of no conflict, the embodiments in the present application and the features in the embodiments can be combined with each other. In addition, it should also be noted that the terms such as front, back, up, down, left, right, top, bottom, front, back, horizontal, vertical, etc. used in this application to indicate orientation are only for convenience of description and are used to to aid in the understanding of relative positions or orientations, and is not intended to limit the orientation of any device or structure.
[0030] The presen...
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