Biomimetic sensor for measuring mechanical signals and manufacturing method of biomimetic sensor

Abstract

The invention provides a biomimetic sensor for measuring mechanical signals and a manufacturing method of the biomimetic sensor. The biomimetic sensor comprises a sensor unit, a sensor bracket and a resistance detection device, wherein the sensor unit comprises a flexible substrate layer, a hair rod and a signal processing layer; the hair rod and the signal processing layer are arranged on the flexible substrate layer; the hair rod is in an inverted circular truncated cone shape; and cracks are formed in the signal processing layer. According to the biomimetic sensor disclosed by the invention, the hair rod in the inverted circular truncated cone shape has relatively large inertia; the cracks on the signal processing layer can be opened and closed along with deformation of the flexible substrate layer in the measurement process, and large resistance change can be obtained, so that the measurement sensitivity of the biomimetic sensor is improved, and the biomimetic sensor can be suitable for detecting weak mechanical signals. In addition, the biomimetic sensor can measure various mechanical signals in space and a plane at the same time, and the biomimetic sensor is high in adaptability to multiple signals in the space and the plane and high in integration degree.

Description

technical field [0001] The present application relates to the technical field of mechanical signal measurement, in particular to a bionic sensor for measuring mechanical signals and a manufacturing method thereof. Background technique [0002] With the development of smart devices, such as smart wearable devices, aerospace equipment and high-precision machine tool processing, it is of great significance to accurately measure mechanical signals in the environment. Existing sensors for measuring mechanical signals include acceleration sensors, stress sensors, or flow sensors. The measurement objects of existing sensors are relatively single. For example, acceleration sensors can only be used to measure acceleration signals, and flow sensors can only be used to measure spatial flow signals. Poor adaptability to multiple signals in space and plane, and low integration. In addition, the existing sensors have low detection sensitivity and are not applicable to the measurement of ...

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Problems solved by technology

[0004] In view of the deficiencies in the prior art above, the purpose of the present invention is to provide a bionic sensor for measuring mechanical signals and its manufacturing method, which overcomes the single measurement object of the existing sensor, poor adaptability to multiple signals in space and plane, integrated Low accuracy, low detection sensitivity, not suitable for detection of weak mechanical signals, etc.

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