Non-contact mirror surface interval measurement method based on matrix optical calculation

Abstract

The invention relates to a non-contact mirror surface interval measurement method based on matrix optical calculation. The method comprises the following steps: detecting interference signals of two paths of reflected light by using a detector; determining a position parameter candidate region in a light path of a measuring arm; and determining an optimal position parameter measured by a measuredlens group in the position parameter candidate region, and measuring thicknesses of all lenses in the measured lens group and air intervals of surfaces under the position parameter. Aiming at intervalmeasurement of a visible light optical system with any mirror surface number, an optimal lens interval and a working distance of a measuring head can be automatically and quickly found, energy maximization of all measured mirror surfaces can be balanced, and the working efficiency and precision of interval measurement are greatly improved.

Description

technical field [0001] The invention belongs to the technical field of optical adjustment and relates to a method for measuring the distance between mirrors used in a non-contact measuring instrument for distance between mirrors. Background technique [0002] As the last link of lens production, optical adjustment is one of the keys to ensure the performance of optical lenses by strictly controlling the center deviation and mirror spacing of optical lenses. In addition, the inspection and verification of the interval of the assembled optical lens group is also a problem often encountered by optical personnel. Based on the principle of low-coherence interference, the non-contact mirror interval measuring instrument can assist the installer to monitor and measure the interval in real time during the lens installation process, and can also accurately measure the interval of the finished optical mirror group. Compared with classical laser interferometers, low-coherence interfer...

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Problems solved by technology

[0004] If there is no operation function of intelligent analysis, the selection of position parameters is made by the testers after repeated attempts, and finally determined based on experience. When the number of mirrors increases, it is difficult for testers to find suitable position parameters. It is possible to obtain all lens surfaces at one time and return Based on this empirical method, the maximum number of surfaces that can be measured at one time is about 8-10 pieces, which greatly limits the practicability of the interval measuring instrument

[0005] For example, the number of mirrors in the lithography machine system is mostly more than 10 pieces. Based on the empirically determined position parameter measurement scheme, multiple measurements are often required, and for some lens surfaces (such as glued surfaces), unsatisfactory results may occur. The intelligent analysis function of position parameters is particularly important

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