Micro Differential Pressure Sensor Based on Stress Isolation Structure

Abstract

The invention provides a differential pressure sensor based on a stress isolation structure, which belongs to the technical field of sensors. The differential pressure sensor includes a base, a pressure sensing component, a pressure guiding part and a pressure transmission tube, wherein the pressure sensing component is arranged on one side of the base along its thickness direction; the first end of the pressure guiding part is connected to the The positive pressure side of the pressure-sensing component is connected, and the second end of the pressure-inducing member is used to connect with the first medium to be measured; the first end of the pressure-transmitting tube passes through the base to connect with the pressure-sensing component connected to the negative pressure side of the pressure transmission tube, the second end of the pressure transmission tube is used to connect with the second medium to be measured, and at least one first stress relief part is arranged on the pressure transmission tube, and the first stress relief part The connection stress at the connection between the pressure transmission tube and the base can be released. Assembly stress can be avoided by the first stress release part provided on the pressure transmission tube, so that the temperature drift of the differential pressure sensor is small, the temperature characteristic is stable, the temperature range is wide, the medium adaptability is strong, and the precision is high.

Description

technical field [0001] The invention belongs to the technical field of sensors, in particular to a differential pressure sensor based on a stress isolation structure. Background technique [0002] The differential pressure sensor is a common tool for measuring the pressure difference of gas or liquid in the industrial field. At present, most of the small-range differential pressure sensors on the market are made of plastic packages, and are mainly used in the civil industry for measurement. The measurement temperature range is narrow, and the measurement medium is mainly non-corrosive dry gas medium. In addition, since the pressure measured by the differential pressure sensor is small, the assembly stress during installation and use has a great influence on the measurement data, resulting in errors in the use of the instrument. [0003] Therefore, there is an urgent need to develop a micro-differential pressure sensor that can reduce the influence of assembly stress, has hi...

AI Technical Summary

Problems solved by technology

At present, the sensors used to measure small-range differential pressure on the market are mostly made of plastic packages. They are mainly used in the measurement of civil and industrial fields. The measurement temperature range is narrow, and the measurement medium is mainly non-corrosive dry gas medium.

In addition, due to the small pressure measured by the differential pressure sensor, the assembly stress during installation and use has a great influence on the measurement data, resulting in errors in the instrument during use

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