External common-optical-path off-axis digital holographic microimaging device
A technology of digital holographic microscopy and imaging devices, which is applied in measuring devices, material analysis through optical means, instruments, etc., can solve problems such as high coherent noise and difficult optical path adjustment, and achieve high coherent noise and difficult optical path adjustment , High dynamic real-time measurement effect
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[0031] Specific embodiment: carry out actual test with microlens array as measured object; Commercial optical microscope 14 adopts the optical microscope 37XF that Shanghai optical instrument factory produces; The focal length of the 4th lens 10 is 60mm; The line logarithm of one-dimensional periodic grating 9 is 100Line / mm. The filter 11 is processed by a metal sheet; the imaging detector 12 adopts a CCD camera with a pixel size of 2.2 microns. In actual measurement, the off-axis holograms of the microlens array and a single lens recorded by the imaging detector 12 are shown as Figure 4 (a) and Figure 5 (a) shown. Finally, the off-axis hologram is reconstructed using the well-known numerical reconstruction method in the field of digital holography, and the three-dimensional height information of the measured object can be obtained (such as Figure 4 (b) and Figure 5 (b)), two-dimensional height information (such as Figure 4 (c) and Figure 5 (c)), and the two-dimens...
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