A Method for Improving the Laser Damage Resistance of Optical Thin Film Components

Abstract

The invention provides a method for improving the laser damage resistance of an optical thin film element, comprising: first obtaining the functional damage threshold of the optical thin film element; then performing coating treatment and laser-induced plasma impact post-treatment of the optical thin film element: obtaining the The functional damage thresholds of all thin-film elements after laser-induced plasma post-treatment with different scanning parameters; the largest functional damage threshold is selected as the optimal functional damage threshold of optical thin-film elements, and the corresponding pulse width and scanning parameters are the most Optimum parameters; using the optimal parameters to perform laser-induced plasma post-treatment on the optical thin film elements to improve the ability of the optical thin film elements to resist laser damage. The invention can simultaneously reduce the defect density of structural and absorption defects in the film, and can improve the mechanical properties such as the bonding force between the film interfaces, solving the problem that the current post-processing technology is only effective for a small number of film element types and improves the effect There are also limited puzzles.

Description

technical field [0001] The invention belongs to the field of optical thin film pretreatment, and in particular relates to a method for improving the anti-laser damage ability of an optical thin film element based on laser-induced plasma action under single-pulse and multi-pulse nanosecond laser irradiation. Background technique [0002] Among the many optical components of the laser device, the optical thin film component manipulates the transmission of the laser beam, which will produce laser damage under high energy flux density irradiation, and even cause a chain reaction when the damage is severe, resulting in damage to other optical components, and then Crashes the entire laser system. The development of modern high-power laser technology has put forward more and more stringent requirements on the performance of optical thin-film components, such as requiring high optical precision, high mechanical properties and high-precision surface shape control, etc., especially it...

AI Technical Summary

Problems solved by technology

However, regardless of the work carried out in terms of film system design, film deposition process, or film post-treatment technology, it has been difficult to realize the simultaneous removal of defects for optical thin film elements deposited by electron beam evaporation due to the current technical means. Reduce and improve the mechanical properties of the film, especially applicable to different types of thin film elements