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Integrated circuit current detection device and method

A current detection, integrated circuit technology, applied in measurement devices, electronic circuit testing, voltage/current isolation, etc., can solve problems such as inability to detect node currents

Pending Publication Date: 2020-07-17
XI AN UNIIC SEMICON CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] What the present invention aims to solve is the problem that the node current cannot be directly detected on the wafer

Method used

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  • Integrated circuit current detection device and method
  • Integrated circuit current detection device and method
  • Integrated circuit current detection device and method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0087] This embodiment provides an integrated circuit current detection device. In order to detect the current between the front-end circuit and the back-end circuit, in the process of forming an integrated circuit on a wafer, the current between the front-end circuit and the back-end circuit is The test wire is set or connected to the current detection layer, and a detection circuit connected to the test wire is formed on the current detection layer. figure 2 It is a schematic diagram of the circuit structure of the integrated circuit current detection device. The integrated circuit current detection device includes a test wire L21, a detection circuit 21, and a first test pad P21. The test wire L21 and the detection circuit 21 are arranged in an integrated The current detection layer in the circuit, the current detection layer is used to set up devices or wires related to integrated circuit testing.

[0088] Specifically, the test wire L21 is connected between the front-end...

Embodiment 2

[0135] Based on the same inventive concept, this embodiment provides an integrated circuit current detection method, including:

[0136] Use test wires to connect the front-end circuit and the back-end circuit;

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Abstract

The invention discloses an integrated circuit current detection device and method. The integrated circuit current detection device comprises a test wire, a detection circuit and a first test bonding pad, the test wire is connected between a front-end circuit and a rear-end circuit; the detection circuit is used for detecting current flowing through the test wire and converting the current flowingthrough the test wire into voltage; and the first test bonding pad is used for being connected with an output end of the detection circuit. According to the integrated circuit current detection deviceand method provided by the invention, the node current can be directly detected on a wafer.

Description

technical field [0001] The invention relates to the technical field of integrated circuit design, in particular to an integrated circuit current detection device and method. Background technique [0002] An integrated circuit (IC, Integrated Circuit) is relative to a discrete circuit. It makes field effect transistors, diodes, resistors, capacitors and other components and the connections between them on a semiconductor chip to form an indivisible whole. make it have a specific function. At present, integrated circuits have become the core devices in modern electronic circuits and are widely used in various electronic devices. With the continuous enhancement of the information processing function of integrated circuits, their own power consumption is also increasing, and low power consumption is becoming one of the important evaluation indicators of integrated circuit performance. Therefore, the power consumption test has become the main test object in the process of integ...

Claims

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Application Information

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IPC IPC(8): G01R19/00G01R15/20G01R31/28
CPCG01R19/0053G01R15/202G01R31/2856
Inventor 刘永丽廖振伟张涛
Owner XI AN UNIIC SEMICON CO LTD
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