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Mask plate barcode scanning device, plate library, transmission system, and scanning method

A barcode scanning and reticle technology, which is applied in the field of lithography equipment, can solve the problems of not being able to dynamically scan and identify mask barcodes, and achieve the effects of improving barcode scanning efficiency and scanning accuracy, improving plate taking efficiency, and improving versatility

Active Publication Date: 2022-02-15
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The object of the present invention is to provide a mask barcode scanning device, plate library, transmission system and scanning method to solve the problem of not being able to dynamically scan and identify mask barcodes

Method used

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  • Mask plate barcode scanning device, plate library, transmission system, and scanning method
  • Mask plate barcode scanning device, plate library, transmission system, and scanning method
  • Mask plate barcode scanning device, plate library, transmission system, and scanning method

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Embodiment Construction

[0049] A reticle barcode scanning device, a plate library, a transmission system and a scanning method proposed by the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. Advantages and features of the present invention will be apparent from the following description and claims. It should be noted that all the drawings are in a very simplified form and use imprecise scales, and are only used to facilitate and clearly assist the purpose of illustrating the embodiments of the present invention. In addition, the structures shown in the drawings are often a part of the actual structure. In particular, each drawing needs to display different emphases, and sometimes uses different scales.

[0050] refer to figure 1 , figure 2 and image 3 , figure 1 is a schematic diagram of a mask barcode scanning device provided by an embodiment of the present invention, figure 2 It is a schematic diagram of th...

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Abstract

The present invention provides a reticle barcode scanning device, a plate library, a transmission system and a scanning method. The reticle barcode scanning device includes: a light source unit, a signal acquisition unit, an electrical processing unit, and an integrated frame unit. The light source unit generates The detection light for barcode scanning, the signal acquisition unit collects the optical signal generated when the detection light passes through the barcode area of ​​the tested reticle in a uniform motion state, and the electrical processing unit processes the collected optical signal to obtain electrical The signal is converted into the information of the reticle, which realizes the dynamic scanning of the barcode of the reticle and the dynamic collection of the information of the reticle, improves the scanning efficiency and scanning accuracy of the barcode of the reticle, and improves the versatility of the device.

Description

technical field [0001] The invention relates to the technical field of photolithography equipment, in particular to a mask plate barcode scanning device, a plate library, a transmission system and a scanning method. Background technique [0002] An essential item in the reticle transmission system is to collect the barcode of the reticle. At present, in the technical field of lithography equipment, industrial cameras are generally used to collect the barcode information of the reticle in the form of photographs. In the process of reading the barcode information of the reticle, the manipulator first takes out the reticle from the reticle box, and then moves to the barcode scanning device of the reticle for alignment operation. After the barcode scanning device takes the barcode photo, the manipulator restarts to The reticle is transported to the designated position, which causes the manipulator and the reticle to stay for a period of time when taking pictures under the lens, ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G06K7/10G06K17/00
CPCG06K7/10564G06K7/10821G06K17/0022
Inventor 耿辉陈淮阳郑教增庞飞郝凤龙
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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