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Mask barcode scanning device, mask library, transmission system and scanning method

A barcode scanning and transmission system technology, applied in the field of lithography equipment, can solve the problem of not being able to dynamically scan and identify reticle barcodes, etc.

Active Publication Date: 2020-07-07
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The object of the present invention is to provide a mask barcode scanning device, plate library, transmission system and scanning method to solve the problem of not being able to dynamically scan and identify mask barcodes

Method used

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  • Mask barcode scanning device, mask library, transmission system and scanning method
  • Mask barcode scanning device, mask library, transmission system and scanning method
  • Mask barcode scanning device, mask library, transmission system and scanning method

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Embodiment Construction

[0049] A reticle barcode scanning device, a plate library, a transmission system and a scanning method proposed by the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. Advantages and features of the present invention will be apparent from the following description and claims. It should be noted that all the drawings are in a very simplified form and use imprecise scales, and are only used to facilitate and clearly assist the purpose of illustrating the embodiments of the present invention. In addition, the structures shown in the drawings are often a part of the actual structure. In particular, each drawing needs to display different emphases, and sometimes uses different scales.

[0050] refer to figure 1 , figure 2 and image 3 , figure 1 is a schematic diagram of a mask barcode scanning device provided by an embodiment of the present invention, figure 2 It is a schematic diagram of th...

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Abstract

The invention provides a mask barcode scanning device, a mask library, a transmission system and a scanning method. The mask plate bar code scanning device comprises a light source unit, a signal acquisition unit, an electrical processing unit and an integrated frame unit; and the light source unit generates detection light for bar code scanning. The signal acquisition unit is used for acquiring an optical signal generated when the detection light passes through a bar code area of the detected mask plate in a uniform motion state, and the electrical processing unit processes the acquired optical signals to obtain electrical signals and converts the electrical signals into mask information, so that dynamic scanning of mask bar codes and dynamic acquisition of mask information are realized,the mask bar code scanning efficiency and scanning precision are improved, and the universality of the device is improved.

Description

technical field [0001] The invention relates to the technical field of photolithography equipment, in particular to a mask plate barcode scanning device, a plate library, a transmission system and a scanning method. Background technique [0002] An essential item in the reticle transmission system is to collect the barcode of the reticle. At present, in the technical field of lithography equipment, industrial cameras are generally used to collect the barcode information of the reticle in the form of photographs. In the process of reading the barcode information of the reticle, the manipulator first takes out the reticle from the reticle box, and then moves to the barcode scanning device of the reticle for alignment operation. After the barcode scanning device takes the barcode photo, the manipulator restarts to The reticle is transported to the designated position, which causes the manipulator and the reticle to stay for a period of time when taking pictures under the lens, ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G06K7/10G06K17/00
CPCG06K7/10564G06K7/10821G06K17/0022
Inventor 耿辉陈淮阳郑教增庞飞郝凤龙
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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