Preparation method of sterilization and disinfection device

Abstract

The invention provides a preparation method of a sterilization and disinfection device. The sterilization and disinfection device comprises: providing a substrate, and sequentially forming a buffer layer, a first semiconductor layer, a transition layer, a light emitting layer and a second semiconductor layer on the substrate, wherein the transition layer comprises an aluminum nitride layer, an aluminum-gallium-nitrogen layer and a gallium nitride layer, and the temperature of forming the aluminum nitride layer is equal to the temperature of forming the first semiconductor layer; and forming the aluminum-gallium-nitrogen layer and the gallium nitride layer by respectively adopting variable-temperature growth. The aluminum nitride layer is formed on the first semiconductor layer, and the temperature of forming the aluminum nitride layer is equal to the temperature of forming the first semiconductor layer; warpage generated in the subsequent cooling process is firstly reduced; an aluminum-gallium-nitrogen layer and gallium nitride layer composite structure are formed on the aluminum nitride layer, and variable-temperature growth is adopted in the process of forming the composite structure, so the internal stress of the material is gradually released; and compared with direct cooling, the method is advantageous in that warping of the epitaxial wafer in the process is reduced, the wafer cracking risk is reduced, and the mismatch problem caused by two different materials can be effectively solved.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to a method for preparing a sterilization and disinfection device. Background technique [0002] Deep ultraviolet LEDs have been recognized by the market for their safety, environmental protection, small size, high efficiency, and low consumption. They have already seen signs in water purifiers, maternal and child products, air conditioners, refrigerators, and other high-end consumer products. The principle of deep ultraviolet sterilization is that deep ultraviolet rays can destroy the DNA or RNA molecular structure of the genetic material in microorganisms, resulting in the inability of bacteria to reproduce or even inactivation, so as to achieve the purpose of sterilization. [0003] Energy saving, long life, and low maintenance cost, deep ultraviolet LED sterilizers are gradually replacing the common mercury lamp ultraviolet sterilizers on the market. One of the important ...

AI Technical Summary

Problems solved by technology

The existing process still has many deficiencies in the preparation of deep ultraviolet LEDs, such as large internal stress of the material, easy to split during the preparation process, etc., which affects the yield rate

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