Cathode heater assembly and preparation method thereof
A heater and cathode technology, applied in the field of cathode heater assembly and its preparation, can solve the problems of complex preparation process, long preheating time, poor reliability, etc., and achieve high heating temperature, short preheating time, and good vibration resistance performance. Effect
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[0027] An embodiment of the present invention provides a method for preparing a cathode heater subassembly, the preparation method comprising: cutting a metal sheet with a preset thickness to obtain a rectangular metal strip, and using the rectangular metal strip as a heater 5; The heater 5 is welded to the surface of the cathode base 1 , which is the surface opposite to the emitting surface of the cathode base 1 . that is figure 2 In the viewing angle shown, the upper surface of the cathode substrate 1 is the emitting surface, and the lower surface is the surface opposite to the emitting surface. At this time, the heater 5 is welded to the lower surface of the cathode base 1 .
[0028] As the metal strip material in the present invention, the following conditions must be met: 1. The evaporation rate is small at the working temperature or the high temperature required in the process. 2. The expansion coefficient is similar to that of the cathode metal material. 3. Good che...
Embodiment 1
[0039] This embodiment provides a cathode thermal subassembly, see figure 2 , the assembly includes: a cathode, and a heater 5 welded to the back surface of the cathode; wherein, the cathode includes a cathode substrate 1, the heater 5 is welded to the surface of the cathode substrate 1, and the heater 5 The thickness of the heater is 0.05mm, the width of the heater 5 is 2mm consistent with the diameter of the cathode base 1, and the length of the heater 5 is 3.5 times the diameter of the cathode base 1. The material of the heater 5 is tungsten.
Embodiment 2
[0040] Embodiment 2: This embodiment provides a method for preparing a cathode heating subassembly. The method includes the following steps:
[0041] Step 1. Cut the tantalum metal sheet with a thickness of 0.05mm into a heater of the required size, a strip-shaped metal strip (i.e. a rectangular metal strip); the width of the metal strip is consistent with the size of the cathode, which is 2mm; the length is the diameter of the cathode 3.5 times, that is 7mm. The metal strip is the heater.
[0042] Step 1. Weld the cathode substrate with a diameter of 2 mm on the metal strip by laser welding.
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