Can roll and long substrate treatment device

Abstract

[Problem] To provide a can roll in which a cooling gas is prevented from leaking from an unwrapped region of the can roll 56 around which a long substrate is not wrapped; and a long substrate treatment device in which the can roll is used. [Solution] A can roll having a gas discharge mechanism for selectively feeding a gas to a plurality of gas introduction paths 14 provided to the can roll with arotary joint 20 interposed therebetween, said rotary joint 20 comprising a fixed ring unit 22 and a rotating ring unit 21 having a sliding surface, wherein the can roll is characterized in that: a rotation opening 23a provided on the sliding surface of the rotating ring unit is blocked by an arcuate packing member 42 fitted into an annular concave groove 27a of the fixed ring unit, whereby leakage of gas from the unwrapped region is prevented; and the applied arcuate packing member has an end-part inclined surface 42b on one surface facing the gas control sliding surface of the rotating ringunit. When the packing member is fixed in a pressed state, the action of the end-part inclined surface 42b prevents the end part of the packing member from lifting.

Description

technical field [0001] The present invention relates to performing ion beam processing in a state where a long substrate such as a long heat-resistant resin film conveyed in a roll-to-roll manner in a vacuum chamber is wound around the outer peripheral surface of a can roll An elongated substrate processing apparatus for surface treatment that applies a heat load such as sputtering film formation, and particularly relates to a drum having a gas release mechanism with a high cooling effect and capable of suppressing gas leakage from the outer peripheral surface of a drum roll on which an elongated substrate is not wound. Improvement of a roller and a long substrate processing apparatus using the can roller. Background technique [0002] Flexible wiring substrates are used in liquid crystal panels, notebook computers, digital cameras, mobile phones, and the like. The flexible wiring board is produced from a heat-resistant resin film with a metal film formed by forming a metal...

AI Technical Summary

Problems solved by technology

[0012] However, for the method of Patent Document 5, which uses the film surface to press the valve protruding and retracting from the outer peripheral surface of the can roll to open the gas release port, slight damage or depression may occur on the film surface due to the contact of the valve. Difficult to use in the manufacture of flexible wiring boards that require high-quality electronic equipment

In addition, in the method of Patent Document 6 in which a cover is attached to a region where the film is not wound (non-wrapped region) inside the outer peripheral surface of the can roll, in a processing apparatus that forms a film at a high vacuum degree, the gas It is easy to leak from the gap between the cover and the outer peripheral surface of the can roll. Therefore, it is difficult to adopt the method of Patent Document 6 similarly to the method of Patent Document 5.

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