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Washing device for masks

A technology for cleaning devices and masks, applied in the direction of liquid cleaning methods, cleaning methods and utensils, chemical instruments and methods, etc., can solve the problems that affect the use, the masks with holes are not easy to clean thoroughly, etc. Achieve good cleaning effect, fast cleaning and thorough cleaning

Active Publication Date: 2020-05-01
天津智安微电子技术有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Most of the existing cleaning devices use immersion cleaning when cleaning the mask. This cleaning method is not easy to clean the mask with holes, which will affect the subsequent use.

Method used

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  • Washing device for masks
  • Washing device for masks
  • Washing device for masks

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0040]A cleaning device for a mask plate, comprising a fixing base 1, a cleaning tank 2 is fixedly arranged on the fixing base 1, a cleaning frame 3 is arranged in the cleaning tank 2, and a plurality of groups of insertion grooves 301 are arranged in the cleaning frame 3 for inserting A mask plate is provided, wherein the mask plate is inserted into the insertion slot 301 formed by the two adjacent limit blocks, and the bottom of the cleaning frame 3 is clamped and fixed with the cleaning tank 2 through the fixed support 4; the cleaning frame 3 can be The frame cover 5 is disassembled and fixed, and the center of the frame cover 5 is fixedly connected with a connecting shaft 6, and the top of the connecting shaft 6 is connected with a top plate 8 through a bearing 7, and a servo motor is fixedly installed on the top plate 8 as the power to drive the connecting shaft 6 to rotate. In the device 9 , the output shaft of the servo motor is fixedly connected to the connecting shaft ...

Embodiment 2

[0054] A cleaning device for a mask plate, comprising a fixing base 1, a cleaning tank 2 is fixedly arranged on the fixing base 1, a cleaning frame 3 is arranged in the cleaning tank 2, and a plurality of groups of insertion grooves 301 are arranged in the cleaning frame 3 for inserting A mask plate is set, the bottom of the cleaning frame 3 is clamped and fixed with the cleaning tank 2 through the fixed support 4; the cleaning frame 3 is detachably installed and fixed with a frame cover 5, and the center of the frame cover 5 is fixedly connected with a connecting shaft 6, and the connecting shaft 6 The top is rotatably connected with a top plate 8 through a bearing 7, and a servo motor is fixedly installed on the top plate 8 as a power device 9 that drives the connecting shaft 6 to rotate. The output shaft of the servo motor is fixedly connected with the connecting shaft 6 through a shaft sleeve; A lifting device 10 is installed, and the top of the lifting device 10 is clamped...

Embodiment 3

[0069] A cleaning device for a mask plate, comprising a fixing base 1, a cleaning tank 2 is fixedly arranged on the fixing base 1, a cleaning frame 3 is arranged in the cleaning tank 2, and a plurality of groups of insertion grooves 301 are arranged in the cleaning frame 3 for inserting A mask plate is set, the bottom of the cleaning frame 3 is clamped and fixed with the cleaning tank 2 through the fixed support 4; the cleaning frame 3 is detachably installed and fixed with a frame cover 5, and the center of the frame cover 5 is fixedly connected with a connecting shaft 6, and the connecting shaft 6 The top is rotatably connected with a top plate 8 through a bearing 7, and a servo motor is fixedly installed on the top plate 8 as a power device 9 that drives the connecting shaft 6 to rotate. The output shaft of the servo motor is fixedly connected with the connecting shaft 6 through a shaft sleeve; A lifting device 10 is installed, and the top of the lifting device 10 is clamped...

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PUM

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Abstract

The invention provides a washing device for masks. The washing device for the masks comprises a fixing seat, wherein a washing groove is fixedly formed in the fixing seat, a washing frame is arrangedin the washing groove, a plurality of sets of inserting grooves are formed in the washing frame and used for inserting the masks, and the bottom of the washing frame is clamped and fixed to the washing groove through a fixing support seat; a frame cover is detachably arranged and fixed on the washing frame, a connecting shaft is fixedly connected to the center of the frame cover, a top plate is rotationally connected to the top of the connecting shaft through a bearing, and a power device for driving the connecting shaft to rotate is arranged on the top plate; and a lifting device is further fixedly arranged on the fixing seat, and the top plate is clamped to the top of the lifting device. The washing device is used for washing the masks, the operation is simple, and washing is thorough.

Description

technical field [0001] The invention belongs to the field of mask plate processing equipment, and in particular relates to a mask plate cleaning device. Background technique [0002] With the rapid development of the modern electronics industry, the processing technology of mobile phone backplane textures, flat panel displays, and micro-nano structures of integrated circuit boards is becoming more and more critical, and mask exposure is one of them. The mask plate used in mask plate exposure is usually coated with a layer of chromium on quartz glass, and the required pattern is produced by exposure etching process. The exposure experiment cannot be carried out after the mask plate is dirty, otherwise the dirty imprint on it will be transferred to the photoresist plate without reservation. Therefore, the cleaning of dirty masks is very important. [0003] Most of the existing cleaning devices use immersion cleaning when cleaning the mask. This cleaning method is not easy to...

Claims

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Application Information

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IPC IPC(8): B08B3/08B08B3/10B08B3/12B08B13/00B08B7/00
CPCB08B3/08B08B3/10B08B3/123B08B13/00B08B7/00
Inventor 张国辉王彩霞
Owner 天津智安微电子技术有限公司
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