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High-speed laser processing device and method based on spatial light modulator and scanning galvanometer

A spatial light modulator and laser processing technology, applied in manufacturing tools, laser welding equipment, metal processing equipment, etc., can solve problems such as processing efficiency limitations, and achieve the effects of small energy loss, wide range of laser light sources, and good flexibility

Inactive Publication Date: 2020-04-17
UNIV OF SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, galvanometer scanning relies on a single light spot to scan and process materials, and the processing efficiency is still severely limited.

Method used

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  • High-speed laser processing device and method based on spatial light modulator and scanning galvanometer
  • High-speed laser processing device and method based on spatial light modulator and scanning galvanometer
  • High-speed laser processing device and method based on spatial light modulator and scanning galvanometer

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Effect test

Embodiment 1

[0061] For the application scenarios of large-scale high-efficiency laser marking or surface treatment, the optical path system such as figure 1 shown. Among them, the λ / 2 wave plate 2 and the polarizing prism 3 form a beam energy attenuator, which is used to control the energy and polarization state of the beam; the first lens 4 and the second lens 5 expand the beam; the spatial light modulator 7 passes Load the pre-designed computational hologram to realize the adjustment of the phase distribution of the incident beam (for the application of high-power laser, the spatial light modulation device can be replaced with a customized phase plate or grating), and the phase-adjusted beam enters the galvanometer system, The deflection following the galvanometer angle achieves 2θ deflection. The deflected beam enters the flat-field lens for focusing, and its focal point will perform high-speed translation in the two-dimensional space of the focal plane to realize the processing of ma...

Embodiment 2

[0064] For the application scenarios of large-scale high-efficiency laser marking or surface treatment, the scanning speed can be increased by more than an order of magnitude (greater than 500m / s) by using a high-resonance frequency scanning galvanometer (12kHz). Combined with parallel scanning of 10×10 multi-focus array, the processing speed of traditional laser marking can be further increased by two orders of magnitude; with the z-phase linear moving platform, scanning and switching of different layers can be realized, so that the system can be used to complete laser three-dimensional forming or three-dimensional Print;

Embodiment 3

[0066] For the application scenario of laser micro-nano processing, the optical system such as figure 2 shown. At this time, it is necessary to add a 4f optical system after the scanning galvanometer system, and replace the focusing lens with a high numerical aperture objective lens. And increase the corresponding real-time observation module. The phase-adjusted beam enters the galvanometer system, and follows the angular deflection of the galvanometer for 2θ deflection. The deflected light beam enters the 4f system (the third lens 9', the fourth lens 11), which is used to control the deflection displacement of the light beam before entering the focusing lens. The laser beam then enters the 12-microscope objective lens to achieve focused processing of the material. The multi-focus array realizes the parallel scanning of the single-layer plane through the deflection of the scanning galvanometer, and uses the linear nano-piezoelectric positioning platform to realize the z-ax...

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Abstract

The invention discloses a high-speed laser processing device and a processing method. The device comprises a light source incident light path system, the spatial light modulator, a scanning galvanometer system and a sample processing system, wherein the spatial light modulator is used for loading a pre-designed phase hologram to realize control outgoing beam phase distribution of the light sourceincident light path system; and a light beam emitted from the spatial light modulator enters the scanning galvanometer system, so that inclination-angle deflection is realized along with deflection ofan angle of a scanning galvanometer. The method and the system disclosed by the invention utilizes a multi-focus array to replace a single focus to perform laser scanning, so that processing efficiency can be improved by two orders of magnitude or more; and the multi-focus array is generated by phase distribution modulation, on a light beam, of the spatial light modulator, and amplitude distribution of the light beam is not affected, so that energy loss is small. Spatial position distribution and strength distribution of the multi-focus array obtained by the method can be freely controlled, so that flexibility is very good.

Description

technical field [0001] The invention relates to the technical field of laser manufacturing, in particular to a high-speed laser processing device and method based on a spatial light modulator and a scanning galvanometer. Background technique [0002] Laser processing relies on the interaction between light and materials, and processes different types of materials based on different mechanisms such as photopolymerization, ablation, and melting. Laser processing technology has the advantages of high processing precision, small heat-affected area, no contact with materials, and environmental protection. It has been widely used in laser marking, 3D printing, metal cutting, welding and surface treatment. At present, the laser processing of materials mainly depends on two scanning methods: the linear moving platform drives the sample scanning and the galvanometer controls the laser spot scanning. In the two ways, one of the light spot and the sample is kept stationary to realize ...

Claims

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Application Information

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IPC IPC(8): B23K26/064B23K26/082B23K26/00B23K26/362B23K26/352
CPCB23K26/00B23K26/0643B23K26/0648B23K26/362B23K26/064B23K26/082B23K26/352
Inventor 胡衍雷吴东李家文褚家如
Owner UNIV OF SCI & TECH OF CHINA
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