Gas filling system and filling method

Abstract

The invention aims at the disadvantages that the purity of the helium is reduced when the helium filling method and equipment in the prior art are used to fill the helium, resulting in low performance, low service life and high operating cost of the helium compressor, and provides a gas filling system and filling method, the invention is provided with a pressure regulating valve, a filter and an isolating valve 1 at the end of the gas supply pipeline connected to the gas supply container, and is provided with an isolating valve 5 at the end connected with the device to be filled, The filter is located between the isolation valve 1 and the pressure regulating valve. It is also equipped with a high vacuum pump and a vacuum gauge, as well as a heating device and a temperature detection device. The heating device of the heating device is electrically connected to the output end of the temperature control device. The temperature detection device is connected to the temperature control device The input end of the device is electrically connected; the method and system of the present invention are used to fill the gas, the residual gas can be extracted more thoroughly, and at the same time, the RGA is used to monitor the gas composition, and the gas composition is scanned and monitored in real time, so as to minimize the residual gas content in the space .

Description

technical field [0001] The invention relates to the technical field of gas filling, in particular to a high-purity or ultra-high-purity gas filling system and filling method. Background technique [0002] Helium is one of the indispensable and important scarce resources in the field of national defense and military industry and high-tech research. Due to the special physical and chemical properties of helium, it is used in some fields such as the research of low-temperature superconductors, the research of medical nuclear magnetic resonance technology, and the field of aerospace. , The field of missile weapons industry has an irreplaceable position. At the same time, helium compressors are also widely used in the above fields. People use helium compressors to obtain ultra-low temperatures to achieve various researches. Due to the need to obtain ultra-low temperatures, so for The purity of the helium in the helium compressor is very high. Usually, the purity of the high-puri...

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to solve the disadvantages that the purity of helium is reduced when using the prior art helium filling method and equipment to fill helium, resulting in low performance and low service life of the helium compressor, and the high operating cost of the compressor , providing a gas filling system and filling method

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