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Method for improving sensitivity of gas sensor

A gas sensor and sensitivity technology, used in instruments, scientific instruments, measuring devices, etc., can solve the problems of low sensitivity and poor effect, and achieve the effect of good sensitivity and improved sensitivity

Inactive Publication Date: 2020-03-31
BEIJING INSTITUTE OF TECHNOLOGYGY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The purpose of the present invention is to solve the problem of low sensitivity and poor effect at room temperature in the prior art, and to provide a method for improving the sensitivity of the gas sensor; the method uses a metal with a large work function difference with the gas sensitive material as the The electrode, connected with the gas sensitive material, can achieve the purpose of improving the gas detection sensitivity

Method used

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  • Method for improving sensitivity of gas sensor

Examples

Experimental program
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Effect test

Embodiment 1

[0035] A method for improving the sensitivity of a gas sensor requires only replacing the metal of an electrode connected to a gas-sensitive material with manganese metal. The gas sensitive material is SnS 2 ;

[0036] as attached figure 1 As shown in , in operation step 1, a piece of gas-sensitive material is transferred to an insulating substrate, for example, SnS 2 Material is transferred to glass slides.

[0037] as attached figure 2 As shown in , the operation step 2 is to make a mask on the gas-sensitive material. First, a suitable mask is formed by ultraviolet photolithography, and then a layer of manganese metal is plated on one side of the mask by vacuum evaporation. , and then wash off the mask with acetone alcohol to form the required conductive electrodes. For ease of illustration, only the 2-terminal electrode is shown in the figure, and more complex electrode structures can also be used.

[0038] as attached image 3 As shown in , in operation step 3, the...

Embodiment 2

[0043] as attached Figure 8 As shown in , this is a schematic diagram showing the effect of the built-in electric field formed at the metal-semiconductor contact interface on the gas sensor.

[0044] This figure uses manganese metal (4.1eV) as the electrode contacting SnS 2 (5.36eV) gas sensitive material, the target molecule absorbed is NO 2 .

[0045] Figure 8 In, the solid line is the adsorption of NO 2 The current-voltage relationship before the gas, the vertical dotted line is the bias voltage V applied at both ends of the sensor during detection 0 , the horizontal dotted line is the corresponding current I at this moment 0 ; When the sensor adsorbs NO 2 After the gas molecules, part of the charge accumulated at the metal-semiconductor contact interface is bound, which is equivalent to reducing the SnS at the interface. 2 The Fermi surface, and the metal-semiconductor contact in order to achieve the Fermi surface balance, the electrons in the metal will continue ...

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Abstract

The invention relates to a method for improving the sensitivity of a gas sensor, and belongs to the field of gas sensors and the field of solid physics. Manganese or magnesium metal is adopted as an electrode material in contact with a gas sensitive material, and the characteristic that the manganese or magnesium metal has a lower work function than titanium, gold and other materials is utilized,so that the effect of improving the sensitivity of the gas sensor only by changing the material used by the contact electrode is achieved. According to the method for improving the sensitivity of thegas sensor, the metal with the large work function difference value with the gas sensitive material serves as the metal connected with the gas sensitive material, and the sensitivity of the gas sensorcan be improved. The method for improving the sensitivity is simple, and does not have strong requirements on environmental conditions in the use process.

Description

technical field [0001] The invention relates to a method for improving the sensitivity of a gas sensor, belonging to the fields of gas sensors and solid physics. Background technique [0002] A gas sensor is a sensor that detects the content of one or several gases in the environment. The gas sensor is usually a gas-sensitive material (gas-sensitive) part as the core of the detection, which has a strong adsorption effect on one or several gas molecules in the air, thereby changing the electrical properties of the material, and finally reading the electrical properties. signal to obtain ambient gas information. [0003] However, the sensitivity of the new gas sensors reported in the past two decades is low at room temperature, and most of the methods to obtain higher sensitivity use the means of increasing the working temperature, so it needs to consume a lot of energy to provide a high temperature environment, high temperature It is often accompanied by many hidden dangers...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/12
CPCG01N27/125
Inventor 吴汉春闫文杰
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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