Reduction furnace sequence control method based on DCS of polycrystalline silicon production device

Abstract

The invention discloses a reduction furnace sequence control method based on a DCS (Distributed Control System) of a polycrystalline silicon production device. The reduction furnace sequence control method comprises the following specific programs: S1, an initial emptying sequence control program; S2, a pressure check sequence control program; S3, a gas replacement sequence control program; S4, amain reaction preparation sequence control program; S5, a material feeding climbing program and a step switching program in the main reaction stage; S6, a main reaction shutdown sequence control program; S7, a nitrogen replacement sequence control program; and S8, a vacuumizing sequence control program. According to the invention, a highly automatic sequence control program is realized, frequent manual operation is not needed, the operation frequency and labor intensity of staff are remarkably reduced, interference of human factors is reduced, and safe and stable operation of the reduction furnace is guaranteed. Moreover, continuous and stable feeding in the polycrystalline silicon production process is achieved through an automatic control program, and the stability of product quality isremarkably improved.

Description

technical field [0001] The invention relates to the technical field of automatic control, in particular to a reduction furnace sequence control method based on the DCS system of a polysilicon production device. Background technique [0002] The start-up, normal operation, and shutdown of the reduction furnace in the polysilicon industry require manual operations by high-quality operators. When starting up, perform initial exhaust, gas replacement, and pressure leakage checks, observe the vacuum pipeline pressure, and adjust the flow of each part to ensure normal operation. When feeding TCS and H2, it is required to achieve material balance and energy balance. During the shutdown process, all aspects must be taken into account and slow down to prevent damage to the equipment. The operation is cumbersome and the workload is heavy, especially when multiple reduction furnaces are started, run normally and shut down at the same time. , It is easy to cause misoperation, and due to...

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Problems solved by technology

[0002] The start-up, normal operation, and shutdown of the reduction furnace in the polysilicon industry require manual operations by high-quality operators. When starting up, perform initial exhaust, gas replacement, and pressure leakage checks, observe the vacuum pipeline pressure, and adjust the flow of each part to ensure normal operation. When feeding TCS and H2, it is required to achieve material balance and energy balance. During the shutdown process, all aspects must be taken into account and slow down to prevent damage to the equipment. The operation is cumbersome and the workload is heavy, especially when multiple reduction furnaces are started, run normally and shut down at the same time. , it is easy to cause misoperation, and due to the difference in the control level of the operators, the difference in the operation of the reduction furnace is relatively large, which is not conducive to the stable operation of the production device and the stable improvement of product quality

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