Process method for prolonging service life of quartz crucible of silicon single crystal
The technology of a quartz crucible and a process method is applied in the field of improving the service life of a quartz crucible for silicon single crystals, and can solve problems such as damage to the transparent layer of the quartz crucible, difficulty in crystallization of silicon single crystals, and short service life.
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[0026] The present invention will be further described below in conjunction with specific examples.
[0027] This embodiment relates to a method for increasing the service life of a quartz crucible for single crystal silicon, which is applied in the process of Czochralski single crystal. During the charging process of Czochralski single crystal, aluminum hydroxide is added. According to the fact that aluminum hydroxide can be decomposed at high temperature According to the characteristics of aluminum oxide, it is made into a nucleating agent. Under the action of the nucleating agent, the α-cristobalite detached from the inner wall of the quartz crucible during the Czochralski single crystal process is supplemented, and the contact part between the inner wall of the quartz crucible and the silicon solution is increased. Density, improve the corrosion resistance of the crucible, and increase the service life of the quartz crucible.
[0028] In the process of Czochralski single c...
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