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Coating device

A technology of coating device and coating chamber, which is applied in sputtering coating, ion implantation coating, gaseous chemical coating, etc., can solve the problems of low degree of automation, unsafety, and inconvenient cleaning operation of the film layer, and achieve easy operation , the effect of improving the degree of automation

Pending Publication Date: 2019-12-03
LUXSHARE ELECTRONICS TECH (KUNSHAN) LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

There are mainly two ways to open the cover: top opening and side opening. The top opening method mostly uses a manual hoisting mechanism or a cylinder-driven lifting mechanism, which has a low degree of automation; because the opened cover needs to be moved to the side of the equipment , resulting in a large equipment footprint; in addition, it is inconvenient to clean the film layer inside the cover plate, and the operator has to squat down to operate or move the heavy cover plate to another working area to clean the film layer
The opening method of flip side opening is mostly manual operation. Due to the heavy weight of the cover plate, manual opening and closing operations are time-consuming, laborious and unsafe, and must be completed with the assistance of other mechanisms or tools

Method used

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Embodiment Construction

[0025] Please refer to Figure 1 to Figure 8 As shown, the present invention discloses a coating device 100, which can be applied to chemical vapor deposition (hereinafter referred to as CVD) coating equipment, physical vapor deposition (hereinafter referred to as PVD) coating equipment or other vacuum coating equipment.

[0026] Please refer to figure 1 , figure 2 and Image 6 As shown, the coating device 100 includes a main body 1 having a coating chamber 10 , a cover assembly 2 installed on the main body 1 , and a seal between the main body 1 and the cover assembly 2 Element 3, at least two sets of jacking mechanisms 4 for jacking up the cover plate assembly 2, a rotation drive mechanism 5 for driving the cover plate assembly 2 to rotate after the cover plate assembly 2 is lifted, and A safety mechanism 6 for fixing the cover plate assembly 2 in the open position. In the illustrated embodiment of the present invention, the top of the main body 1 is provided with a cham...

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PUM

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Abstract

A coating device comprises a main body part with a coating chamber, a cover plate assembly and a sealing element, and the cover plate assembly comprises a cover plate and a rocker arm fixed on the cover plate. The coating device further comprises at least two sets of jacking mechanisms used for jacking the cover plate assembly and a rotation driving mechanism used for driving the rocker arm to drive the cover plate to rotate around a first rotating shaft. The rocker arm is provided with a fixed part which is positioned at one side of the first rotating shaft and is fixed with the cover plate,and a force application part which is positioned at the other side of the first rotating shaft, the rotation driving mechanism comprises a rotation driving piece and a position compensation mechanism,and the position compensation mechanism is connected with the force application part and is used for preventing the rotation driving piece from being stressed during the process of jacking the coverplate assembly. By means of the arrangement, the coating device is better in performance and is easy to operate.

Description

technical field [0001] The invention relates to a coating device, which can be applied to the technical field of vapor deposition vacuum coating. Background technique [0002] The coating chambers of the coating equipment all need at least one openable and closable cover plate, so as to load products into the coating chamber and unload coated products from the coating chamber. There are mainly two ways to open the cover: top opening and side opening. The top opening method mostly uses a manual hoisting mechanism or a cylinder-driven lifting mechanism, which has a low degree of automation; because the opened cover needs to be moved to the side of the equipment , resulting in a large equipment footprint; in addition, it is inconvenient to clean the film layer inside the cover plate, and the operator has to squat down to operate or move the heavy cover plate to another working area to clean the film layer. The opening method of flip side opening is mostly manual operation. Due...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/00C23C16/00
CPCC23C14/00C23C16/00
Inventor 何宝东王凯宋文庆张建飞盛兆亚
Owner LUXSHARE ELECTRONICS TECH (KUNSHAN) LTD
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